Skip to main content Accessibility help
×
Home

Characterization of Nitride Thin Films by Electron Backscatter Diffraction and Electron Channeling Contrast Imaging

Abstract

In this paper we describe the use of electron backscatter diffraction (EBSD) mapping and electron channeling contrast imaging—in the scanning electron microscope—to study tilt, atomic steps and dislocations in epitaxial GaN thin films. We show results from epitaxial GaN thin films and from a just coalesced epitaxial laterally overgrown GaN thin film. From our results we deduce that EBSD may be used to measure orientation changes of the order of 0.02°, in GaN thin films. As EBSD has a spatial resolution of ≈ 20 nm, this means we have a powerful technique with which to quantitatively map surface tilt. We also demonstrate that channeling contrast in electron channeling contrast images may be used to image tilt, atomic steps and threading dislocations in GaN thin films.

Copyright

References

Hide All
1 Mathis, S. K., Romanov, A. E., Chen, L. F., Belz, G. E., Pompe, W. and Speck, J. S., phys. stat. sol. (a) 179, 125 (2000).
2 Marchand, H., Wu, X. H., Ibbetson, J. P., Fini, P. T., Kozodoy, P., Keller, S., Speck, J. S., DenBaars, S. P. and Mishra, U. K., Appl. Phys. Lett. 73, 747 (1998).
3 Humphreys, F. J., Huang, Y., Brough, I. and Harris, C., J. Microsc., 195, 212 (1999).
4 Schwartz, A. J., Kumar, M. and Adams, B. L., Electron Backscatter Diffraction in Materials Science (Kluwer Academic/Plenum Publishers, 2000)
5 Prior, D., Boyle, A., Brenker, F., Cheadle, M., Day, A., Lopez, G., Peruzzo, L., Potts, G., Reddy, S., Spiess, R., Timms, N., Trimby, P., Wheeler, J., and Zetterström, L., Am. Mineralogist, 84, 1741 (1999).
6 Randle, V. and Engler, O., Texture Analysis, Macrotexture, Microtexture and Orientation Mapping (Taylor & Francis, 2000)
7 Wilkinson, A. J., J. Electron Microsc. 49, 299 (2000).
8 Troost, K. Z., Van Der Sluis, P., and Gravesteijn, D. J., Appl. Phys. Lett. 62, 1110 (1993).
9 Baba-Kishi, K. Z., J. Appl. Cryst. 24, 38 (1991).
10 Trager-Cowan, C., Sweeney, F., Hastie, J., Manson-Smith, S. K., Cowan, D. A., McColl, D., Mohammed, A, O'Donnell, K P, Zubia, D, Hersee, S D, Foxon, C T, Harrison, I and Novikov, S. V, J. Microsc. 205, 226 (2002).
11 Trager-Cowan, C., Sweeney, F., Wilkinson, A. J., Watson, I. M., Middleton, P. G., O'Donnell, K. P., Zubia, D., Hersee, S. D., Einfeldt, S. and Hommel, D., phys. stat. sol. (c) 0, 532 (2002).
12 Sweeney, F. et al. , paper in preparation.
13 Wilkinson, A. J. and Hirsch, P. B., Micron, 28, 279 (1997).
14 Prior, D. J., Trimby, P.W, Weber, U. D. and Dingley, D. J., Mineralogical Magazine, 60, 859 (1996).
15 Prior, D., Boyle, A., Brenker, F., Cheadle, M., Day, A., Lopez, G., Peruzzo, L., Potts, G., Reddy, S., Spiess, R., Timms, N., Trimby, P., Wheeler, J., and Zetterström, L., Am. Mineralogist, 84, 1741 (1999).
16 Watson, I. M., Liu, C., Kim, K. S., Kim, H.-S., Deatcher, C. J., Girkin, J. M., Dawson, M. D., Edwards, P. R., Trager-Cowan, C. and Martin, R. W., phys. stat. sol. (a), 188, 743 (2001).
17 Humphreys, F. J., J. Microsc., 195, 170 (1999).
18 Trimby, P., Trager-Cowan, C. and Parbrook, P. J., HKL Applications Catalogue, 2, 1419 (2003)
19 Trager-Cowan, C. et al. , to be submitted to Phys. Rev. B.
20 Wang, Z. L., Rep. Prog. Phys., 56, 997 (1993).
21 Pohland, O., Tong, X., and Gibson, J. M., J. Vac. Sci. Technol. A 11, 1837 (1993).
22 Lafford, T. A., Parbrook, P. J. and Tanner, B. K., phys. stat. sol. (c), 0, 542 (2002).
23 Follstaedt, D. M., Milssert, N. A., Koleske, D. D., Mitchell, C. C. and Cross, K. C., Appl. Phys. Lett. 83, 4797 (2003).
24 Datta, R., Kappers, M. J., Barnard, J. S. and Humphreys, C. J., Appl. Phys. Lett., 85, 3411, (2004).

Keywords

Characterization of Nitride Thin Films by Electron Backscatter Diffraction and Electron Channeling Contrast Imaging

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed