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Characterization of Metal/A1xIn1-xN Interface Thermal Stability and Electrical Properties

  • Guohua Qiu (a1), Fen Chen (a1), J. O. Olowolafe (a1), C. P. Swann (a2), K. M. Unruh (a2) and D. S. Holmes (a3)...

Abstract

The interfaces between metals and semiconductors are very crucial to the performance and reliability of solid-state devices. At the moment information on the interfaces between metals and group III-nitride semiconductors are very rare. In this study, linear I-V characteristics of titanium and aluminum to A1xIn1-xN of three different composition (x=0.18, 0.50,0.85) were obtained exhibiting ohmic characteristics. Specific contact resistance of these metals to A1.18In.82N and Al.5In.5N was measured by transmission line measurement. Interdiffusion between the metals and the semiconductors, induced by annealing in N2 ambient, was determined using RBS and thermal stability was evaluated.

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Characterization of Metal/A1xIn1-xN Interface Thermal Stability and Electrical Properties

  • Guohua Qiu (a1), Fen Chen (a1), J. O. Olowolafe (a1), C. P. Swann (a2), K. M. Unruh (a2) and D. S. Holmes (a3)...

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