Skip to main content Accessibility help
×
Home

Characterization of Hollow-Cathode DC Discharge Growth of Diamond: Rotational Vibronic Emission In A CH4-H2 Discharge

  • H. N. Chu (a1), A. R. Lefkow (a1), E. A. Den Hartog (a1), J. Jacobs (a1), P. Sandstrom (a1), L. W. Anderson (a1), M. G. Lagally (a1) and J. E. Lawler (a1)...

Abstract

Experiments to study the temperature in the discharge produced using a dc spiral hollow cathode with CH4-H2 as the feed gas have been carried out during the rowth of diamond. Optical emission from the R branch of the 3d1 Σ v-O-2p Σ v-O rotational vibronic band are used to determine a rotational temperature. Limitations of this method are discussed.

Copyright

References

Hide All
1. Matsumoto, S., Jpn. J. Appl. Phys. 21, L183 (1982)
2. Suzuki, K., Appl. Phys. Lett. 50, 728 (1987).
3. Kurihara, K., Appl. Phys. Lett. 52, 437 (1988).
4. Badzian, A. R, Mat. Res. Bull. 23, 531 (1988).
5. Kobashi, K., Phys. Rev. B 38, 4067(1988)
6. Zhu, W., J. Vac. Sci. Technol. A7, 2315 (1989)
7. Tzeng, Y., Appl. Phys. Lett. 53 (23), 5, 2326 (1988).
8. Herzberg, G., in Molecular Spectra and Molecular Structure(Robert E. Krieger Publishing Co., Inc., Florida, 1950) p 205

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed