Skip to main content Accessibility help

Characterization of Green Laser Crystallized GeSi Thin Films

  • Balaji Rangarajan (a1), Ihor Brunets (a1), Peter Oesterlin (a2), Alexey Y. Kovalgin (a1) and Jurriaan Schmitz (a1)...


Green laser crystallization of a-Ge0.85Si0.15 films deposited using Low Pressure Chemical Vapour Deposition is studied. Large grains of 8x2 μm2 size were formed using a location-controlled approach. Characterization is done using Scanning Electron Microscopy, Atomic Force Microscopy, X-Ray Photoelectron Spectroscopy and X-Ray Diffraction.



Hide All
1. Xie, Yuan, “Processor Architecture Design Using 3D Integration Technology”, 23rd International Conference on VLSI Design, DOI 10.1109/VLSI.Design.2010.60.
2. Vinet, M. et al. , “3D monolithic integration: Technological challenges and electrical results”, Microelectronic Engineering 88, (2011) 331–335.10.1016/j.mee.2010.10.022
3. Fedder, G.K et al. , “Technologies for Cofabricating MEMS and Electronics”, Proc. Of IEEE, Vol. 96, No. 2, Feb 2008, pp. 306–322.10.1109/JPROC.2007.911064
4. Fossum, J.G. and Ortiz-Conde, A., IEEE Trans. Electron Devices, Vol. ED-30, NO. 8, August 1983.
5. Ghosh, A. K., Fishman, C., and Feng, T., J. Appl. Phys. 51(1). January 1980.
6. Gouye, A., Kermarrec, O., Halimaoui, A., Campidelli, Y., Rouchon, D., Burdin, M., Holliger, P., Bensahel, D., J. Cryst. Growth 311, 3522 (2009).10.1016/j.jcrysgro.2009.04.011
7. Chen, Tao et al. ., “High Performance Single-Grain Ge TFTs without Seed Substrate”, IEDM 2010, pp. 496–499, IEEE International.
8. Ishihara, R et al. , M, “Excimer-Laser Crystallization of Silicon-Germanium”, Solid State Device Research Conference, pp. 1075–107, 1996. ESSDERC ’96.
9. Brunets, I., Holleman, J., Kovalgin, A.Y., Boogaard, A. and Schmitz, J., IEEE Trans. Electron Devices, Vol. 56, pp. 1637–1644, Aug 2009.10.1109/TED.2009.2023021



Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed