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Characterization of Green Laser Crystallized GeSi Thin Films

  • Balaji Rangarajan (a1), Ihor Brunets (a1), Peter Oesterlin (a2), Alexey Y. Kovalgin (a1) and Jurriaan Schmitz (a1)...

Abstract

Green laser crystallization of a-Ge0.85Si0.15 films deposited using Low Pressure Chemical Vapour Deposition is studied. Large grains of 8x2 μm2 size were formed using a location-controlled approach. Characterization is done using Scanning Electron Microscopy, Atomic Force Microscopy, X-Ray Photoelectron Spectroscopy and X-Ray Diffraction.

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