Hostname: page-component-8448b6f56d-jr42d Total loading time: 0 Render date: 2024-04-24T04:29:50.241Z Has data issue: false hasContentIssue false

Characterization of Glancing Angle Deposition Thin Film Optical Filters with Engineered Index Profiles

Published online by Cambridge University Press:  01 February 2011

James Gospodyn
Affiliation:
gospodyn@ee.ualberta.ca, University of Alberta, Electrical and Computer Engineering, 2nd Floor ECERF, Edmonton, Alberta, T6G 2V4, Canada, (780) 492-7926, (780) 492-2863
Michael T. Taschuk
Affiliation:
mtaschuk@ece.ualberta.ca, University of Alberta, Electrical and Computer Engineering, 2nd Floor ECERF, Edmonton, Alberta, T6G 2V4, Canada
Peter C. P. Hrudey
Affiliation:
phrudey@ualberta.ca, University of Alberta, Electrical and Computer Engineering, 2nd Floor ECERF, Edmonton, Alberta, T6G 2V4, Canada
Ying Y. Tsui
Affiliation:
tsui@ece.ualberta.ca, University of Alberta, Electrical and Computer Engineering, 2nd Floor ECERF, Edmonton, Alberta, T6G 2V4, Canada
Robert Fedosejevs
Affiliation:
rfed@ece.ualberta.ca, University of Alberta, Electrical and Computer Engineering, 2nd Floor ECERF, Edmonton, Alberta, T6G 2V4, Canada
Michael J. Brett
Affiliation:
brett@ece.ualberta.ca, University of Alberta, Electrical and Computer Engineering, 2nd Floor ECERF, Edmonton, Alberta, T6G 2V4, Canada
Jeremy C. Sit
Affiliation:
jsit@ece.ualberta.ca, University of Alberta, Electrical and Computer Engineering, 2nd Floor ECERF, Edmonton, Alberta, T6G 2V4, Canada
Get access

Abstract

Periodic high-/low-index film stacks of Y2O3:Eu were grown with varying periodicities us-ing the glancing angle deposition (GLAD) technique onto silicon and fused silica substrates. Post-deposition annealing at temperatures from 600 to 1000°C for 1 hour in atmosphere was per-formed to enhance the photoluminescent output of the films. The films were optically character-ized using transmission measurements and Mueller matrix ellipsometry. The luminescence was measured using a spectrometer calibrated for absolute intensity measurements using a frequency-quadrupled Nd:YAG pulsed laser as an excitation source. Absolute conversion efficiencies were measured for the films by characterizing the angular emission profile. The angular emission pro-file of the films was found to follow a non-Lambertian emission profile, with peak emission in-tensities at 50° to 60° with respect to the substrate normal.

Type
Research Article
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Robbie, K., Friedrich, L. J., Dew, S. K., Smy, T. and Brett, M. J., J. Vac. Sci. Technol. A 13, 10321035 (1995).Google Scholar
2. Robbie, K., Sit, J. C. and Brett, M. J., J. Vac. Sci. Technol. B 16, 11151122 (1998).Google Scholar
3. Robbie, K. and Brett, M. J., United States Patent No. 6, 248, 422 (June 19 2001)Google Scholar
4. Robbie, K. and Brett, M. J., United States Patent No. 5, 866, 204 (February 2 1999)Google Scholar
5. Robbie, K. and Brett, M. J., J. Vac. Sci. Technol. A 15, 14601465 (1997).Google Scholar
6. Popta, A. C. van, Sit, J. C. and Brett, M. J., Appl. Optics 43, (18), 36323639 (2004).Google Scholar
7. Seto, M. W., Robbie, K., Vick, D., Brett, M. J. and Kuhn, L., J. Vac. Sci. Technol. B 17, 21722177 (1999).Google Scholar
8. Popta, A. C. van, Hawkeye, M. M., Sit, J. C. and Brett, M. J., Opt. Lett. 29, (21), 25452547 (2004).Google Scholar
9. Gospodyn, J. and Sit, J. C., Optical Materials in press, (2006).Google Scholar
10. Hrudey, P. C. P., Taschuk, M., Tsui, Y. Y., Fedosejevs, R. and Brett, M. J., in Nanophotonic Materials, edited by Andrews, D. L., (Proceedings of SPIE, 5510, Denver, CO, 2004) pp. 7887.Google Scholar
11. Hrudey, P. C. P., Taschuk, M., Tsui, Y. Y., Fedosejevs, R., Sit, J. C. and Brett, M. J., J. Nanosci. Nanotechno. 5, 229234 (2005).Google Scholar
12. Hrudey, P. C. P., Taschuk, M., Tsui, Y. Y., Fedosejevs, R. and Brett, M. J., J. Vac. Sci. Technol. A 23, 856861 (2005).Google Scholar
13. Jones, S. L., Kumar, D., Cho, K. G., Singh, R. and Holloway, P. H., Displays 19, 151167 (1999).Google Scholar
14. Kaminska, K., Amassian, A., Martinu, L. and Robbie, K., J. Appl. Phys. 97, 013511 (2005).Google Scholar