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Characterization of Glancing Angle Deposition Thin Film Optical Filters with Engineered Index Profiles
Published online by Cambridge University Press: 01 February 2011
Abstract
Periodic high-/low-index film stacks of Y2O3:Eu were grown with varying periodicities us-ing the glancing angle deposition (GLAD) technique onto silicon and fused silica substrates. Post-deposition annealing at temperatures from 600 to 1000°C for 1 hour in atmosphere was per-formed to enhance the photoluminescent output of the films. The films were optically character-ized using transmission measurements and Mueller matrix ellipsometry. The luminescence was measured using a spectrometer calibrated for absolute intensity measurements using a frequency-quadrupled Nd:YAG pulsed laser as an excitation source. Absolute conversion efficiencies were measured for the films by characterizing the angular emission profile. The angular emission pro-file of the films was found to follow a non-Lambertian emission profile, with peak emission in-tensities at 50° to 60° with respect to the substrate normal.
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- Copyright © Materials Research Society 2006