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The Characteristics of Amorphous Silicon TFT and its Application in Liquid Crystal Display

Published online by Cambridge University Press:  26 February 2011

T. Chikamura ,
S. Hotta  and
S. Nagata
T. Chikamura
Affiliation:
Central Research Laboratory, Matsushita Electric Industrial Co., Ltd.Moriguchi, Osaka, Japan 570
S. Hotta
Affiliation:
Central Research Laboratory, Matsushita Electric Industrial Co., Ltd.Moriguchi, Osaka, Japan 570
S. Nagata
Affiliation:
Central Research Laboratory, Matsushita Electric Industrial Co., Ltd.Moriguchi, Osaka, Japan 570
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Abstract

An amorphous silicon TFT particularly suited for the full color liquid crystal display driver has been developed and reported here. Various fundamental factors involved in the a-Si TFT, such as the effects of structure, materials, and the method of fabrications were reviewed and investigated in terms of the field effect mobility, the threshold voltage and the reliabilities. An inverted-staggered TFT structure was employed for the purpose wherein the interface states between two layers was successfully lowered by employing the successive deposition procedures of SiNx gate insulator on the a-Si layer. Proper ohmic contacts and the blocking of hole injections were accomplished by forming a n+ layer between the a-Si layer and the source/drain metal electrodes which consists of a double layer of Al/MoSi2 in order to prevent the aluminum diffusion into the a-Si layer during the 300°C heat treatment at the succeeding fabrication processes. The degradation of display images due to the high intensity backlights was minimized by employing a light shielding layer and by making the thickness of a-Si layer 200 Å against the direct sunlight of up to 100,000 luxes. Stable actual performances of TFT for more than 4000 hours at 80 °C were confirmed. The development of a color LCD TV driven by this TFT is also reported.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 95: Symposium E – Amorphous Silicon Semiconductors--Pure and Hydrogenated , 1987 , 421
Copyright
Copyright © Materials Research Society 1987

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