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Ceramic Thin Films for High Integration Density Capacitor Applications

  • Dan Taroata (a1) (a2), Tarik A. Cheema (a3), Wolf-Joachim Fischer (a2), Georg Garnweitner (a3) and Guenter Schmid (a1)...

Abstract

We report a novel concept for the direct integration of capacitors in printed circuit boards using ultra-small BaTiO3 and ZrO2 nanoparticles prepared by a chemical method. Electrical properties comparable to surface mount ceramic capacitors were achieved by proper processing of the nanoparticles, achieving a device-yield of >90% under research environment. The loss factor of the presented integrated capacitors does not exceed 0.05 independent of frequency, capacitor’s electrode area or applied bias voltage.

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1. Sigman, J., Brennecka, G.L., Clem, P.G. and Tuttle, B.A., J. Am. Ceram. Soc. 91, 1851 (2008).
2. Roest, A., Mauczok, R., Reimann, K., van Leuken-Peters, L. and Klee, M., IEEE Trans. Ultrason. Ferroelectr. Freq. Control 56 (3), 425428 (2009).
3. Brennecka, G.L. and Tuttle, B.A., J. Mater. Res. 22 (10), 28682874 (2007).
4. Brennecka, G.L., Parish, C.M., Tuttle, B.A. and Brewer, L.N., J. Mater. Res. 23 (1), 176181 (2008).
5. Vehkamäki, M., Hatanpää, T., Ritala, M., Leskelä, M., Väyrynen, S. and Rauhala, E., Chem. Vap. Deposition 13, 239246 (2007).
6. Li, G.Q., Lai, P.T., Zeng, S.H., Huang, M.Q. and Liu, B.Y., Appl. Phys. Lett. 66 (18), 24362438 (1995).
7. Raj, P.M., Balaraman, D., Abothu, I.R., Yoon, C., Kang, N.K. and Tummala, R.R., IEEE Trans. Compon. Packag. Technol. 30 (4), 585594 (2007).
8. Niederberger, M., Garnweitner, G., Pinna, N. and Antonietti, M.J., Am. Chem. Soc. 126 (29), 91209126 (2004).
9. Garnweitner, G., Goldenberg, L.M., Sakhno, O.V., Antonietti, M., Niederberger, M. and Stumpe, J., Small 3 (9), 16261632 (2007).
10. Kim, P., Jones, S.C., Hotchkiss, P.J., Haddock, J.N., Kippelen, B., Marder, S.R. and Perry, J.W., Adv. Mater. 19, 10011005 (2007).
11. Halik, M., Klauk, H., Zschieschang, U., Schmid, G., Dehm, C., Schütz, M., Maisch, S., Effenberger, F., Brunnbauer, M. and Stellacci, F., Nature 431, 963966 (2004).

Keywords

Ceramic Thin Films for High Integration Density Capacitor Applications

  • Dan Taroata (a1) (a2), Tarik A. Cheema (a3), Wolf-Joachim Fischer (a2), Georg Garnweitner (a3) and Guenter Schmid (a1)...

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