Single shot pulses from a Nd:YAG laser were used to generate different sized holes and patterns in tape-cast ceramic sheets for electronic packaging applications. The ceramic sheets were based on formulations in the BaTiO3 and MgO-Al2O3-SiO2 systems. The single shot laser pulses were targeted using a computer controlled mirror deflection system and a programmed (cavitation) pattern which could readily be modified. Morphology and structure of the drilled holes before and after sintering were examined by SEM. The surface radial temperature profile resulting from the laser pulse was directly mapped using a lacquer thermocoat. Effects of the laser pulse energy and beam spot size on laser/ceramic interactions and cavitation process were also explored.