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Cathodoluminescence Study of Gadolinium–Doped Yttrium Oxide Thin Films Deposited By Radio–Frequency Magnetron Sputtering

Published online by Cambridge University Press:  01 February 2011

J. D. Fowlkes ,
P. D. Rack ,
R. Bansal  and
J.M. Fitz–Gerald
J. D. Fowlkes
Affiliation:
Dept. of Materials Science and Engineering, The University of Tennessee, Knoxville, TN 37996 - 2200
P. D. Rack
Affiliation:
Dept. of Materials Science and Engineering, The University of Tennessee, Knoxville, TN 37996 - 2200
R. Bansal
Affiliation:
Dept. of Materials Science and Engineering, The University of Virginia, Charlottesville, VA 22904-4745
J.M. Fitz–Gerald
Affiliation:
Dept. of Materials Science and Engineering, The University of Virginia, Charlottesville, VA 22904-4745
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Abstract

A multi–layer gadolinium–doped yttrium oxide thin film was deposited in a combinatorial fashion on a Si (001) substrate using radio–frequency magnetron sputtering. Alternating layers of Y2O3 and Gd were deposited for a total of 9 layers. The film was homogenized in composition by an 850°C 12 hour thermal treatment producing a range of composition from Y1.96Gd0.04O3-Y1.54Gd0.46O3 in a single film. Ultraviolet emission with a peak wavelength at 314-315nm was observed from the gadolinium 8S7/2 - 6P7/2 transition via cathodoluminescence (CL) excitation. The CL–induced intensity was found to be maximum at 9 at% Gd (Y1.82Gd0.18O3) and an optimized electron probe of Vacc = 13 keV was determined for the 1 μm thick thin film. Gadolinium activator saturation was observed for sample current density greater than 0.03 μA/cm2. Non- radiative decay via thermal pathways is suspected for the observed activator saturation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 764: Symposium C – New Applications for Wide-Bandgap Semiconductors , 2003 , C7.12
Copyright
Copyright © Materials Research Society 2003

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References

1. Ozawa, R., Bunsekikiki 6, 108 (1968).Google Scholar
2. Kano, T., Principal phosphor materials and their optical properties in the Phosphor Handbook, pg. 183, eds. Shionoya, S. and Yen, W. M., CRC Press, Boca Raton 1999.Google Scholar
3. Maestro, P., Huguenin, D., A. Seigneurin & Deneuve, F., J. of Electrochem. Soc. 139, 1470 Google Scholar
4. Jones, S.L., Dissertation, Enhanced Luminescence from Europium Doped Yttrium Oxide Thin Films Grown via Pulsed Laser Deposition, University of Florida, 1997.Google Scholar
5. Carnall, W.T., Goodman, G.L., Rajnak, K., and Rana, R.S., J. of Chem. Phys. 90, 343 (1989).Google Scholar
6. Blasse, G. & Grabmaier, C., pg. 26 in Luminescent Materials, Springer-Verlag, Berlin 1994.Google Scholar
7. Ohring, M., pgs. 106–109 in Materials Science of Thin Films, Deposition & Structure, Academic Press, San Diego, 2002.Google Scholar
8. Mitric, M., Solid State Ionics, 101, 495 (1997).Google Scholar
9. Cho, M.-H., Ko, D.-H., Jeong, K., Whangbo, S.W., Whang, C.N., Choi, S.C., and Cho, S.J., Thin Solid Films, 349, 266 (1999).Google Scholar
10. Allison, S., Oak Ridge National Laboratory, private communications.Google Scholar