Skip to main content Accessibility help

Catalyst formation and growth of Sn- and In-catalyzed silicon nanowires

  • Irene Ngo (a1), Benedict O'Donnell (a2), José Alvarez (a3), Marie Gueunier-Farret (a4), Jean-Paul Kleider (a5), Linwei Yu (a6) and Pere Roca i Cabarrocas (a7)...


Silicon nanowires (Si NWs) were grown directly on transparent conductive oxide layers using a single pump down process in a plasma enhanced chemical vapour deposition (PECVD) system. Layers of ITO and SnO2 on glass substrates were exposed to a hydrogen plasma leading to the reduction of the oxide and to the agglomeration of the metal into catalyst droplets of a few tens of nanometers diameter. The diameter and the density of the nanowires depend on the catalysts droplets size and density, we studied step by step the evolution of the surface prior to and at the initial stage of the nanowire growth. The catalyst droplets size and distribution were essentially investigated through Scanning Electron Microscopy (SEM).



Hide All
1 Kelzenberg, M.D. Boettcher, S.W. Petykiewicz, J.A. et al., Nature Mat. 9 (2010)
2 Wagner, R.S. and Ellis, W.C. Appl. Phys. Lett. 4, 8990 (1964)
3 Schmidt, V. Witteman, J.V. and Gösele, U., Chem. Rev. 110, 361388 (2010)
4 Nebol'sin, V.A. and Shschetinin, A.A. Inorg. Mater. 39 (9), 899903 (2003)10.1023/A:1025588601262
5 Alet, P-J. Yu, L. Patriarche, G. Palacin, S. and Cabarrocas, P. Roca i, J. Mater. Chem. 18, 51875189 (2008)10.1039/b813046a
6 Yu, L., Alet, P-J. Picardi, G. Maurin, I. and Cabarrocas, P. Roca i, Nanotechnology 19, 485605 (2008)10.1088/0957-4484/19/48/485605
7 Alet, P-J. PhD Thesis, Ecole Polytechnique, 2008
8 Lan, J-H. and Kanicki, J., Thin Solid Film 304, 123129 (1997)10.1016/S0040-6090(97)00173-9
9 Merkulov, V.I. Lowndes, D.H. Wei, Y.Y. and Eres, G.., Appl. Phys. Lett. 76 24 (2000)
10 Giridhar, M. and McCoy, B.J. Phys. Chem. Chem. Phys. 5, 54565466 (2003)
11 Yang, D.Q. and Sacher, E. Surf. Sci. 516, 43 (2002)
12 Jeon, M. Uchiyama, H. and Kamisako, K. Mater. Lett. 63, 246248 (2009)10.1016/j.matlet.2008.10.005
13 Yu, L., O'Donnell, B., Alet, P-J. Conesa-Boj, S., Peiro, F. Arbiol, J. and Cabarrocas, P. Roca i, Nanotechnology 20, 225604 (2009)
14 Carey, J.D. Ong, L.L. and Silva, S.R.P. Nanotechnology 10, 12231227 (2003)10.1088/0957-4484/14/11/011
15 Kalache, B. Cabarrocas, P. Roca i and Morral, A. Fontcuberta i, Jpn. J. Appl. Phys. 45, 190193 (2006)10.1143/JJAP.45.L190
16 Iacopii, F., Vereecken, P.M. Schaekers, M. Caymax, M. Moelans, N. Blanpain, B. Richard, O. Detavernier, C. and Griffiths, H. Nanotechnology 18, 505307 (2007)
17 José-Yacaman, M. J., Gutierrez-Wing, C., Miki, M. Piyakis, K.N. and Sacher, E. Phys. Chem. B 109 (19), 97039711 (2005)
18 Bower, C. Zhou, O. Zhu, W. Werder, D.J. and Jin, S. Appl. Phys. Lett. 77, 17 (2000)



Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed