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Bulk and Surface Electronic Properties of Oxide Dielectrics

Published online by Cambridge University Press:  10 February 2011

Victor E. Henrich*
Affiliation:
Surface Science Laboratory, Department of Applied Physics, Yale University, New Haven, CT 06520, victor.henrich@yale.edu
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Abstract

The electronic properties of oxides that are candidates for high-dielectric insulators in ULSI are discussed. The theoretical models that can be used to describe them are compared, and the properties of cation oxidation state and point defects associated with non-stoichiometry in the bulk and on the surface are considered. Metal-oxide surfaces often reconstruct, with the creation of a surface dipole moment The effect of overlayers on metal-oxide surfaces is also discussed.

Type
Research Article
Copyright
Copyright © Materials Research Society 1999

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References

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