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Bottom-up Fabrication of Individual SnO2 Nanowires-based Gas Sensors on Suspended Micromembranes

  • Albert Romano-Rodriguez (a1), Francisco Hernandez-Ramirez (a2), Joan Daniel Prades (a3), Albert Tarancon (a4), Olga Casals (a5), Roman Jimenez-Diaz (a6), Miguel Angel Juli (a7), Juan Ramon Morante (a8), Sven Barth (a9), Sanjay Mathur (a10), Andreas Helwig (a11), Jan Spannhake (a12) and Gerhard Mueller (a13)...

Abstract

Bottom – up techniques were used to obtain gas sensors based on individual SnO2 nanowires placed over microhotplates with integrated heaters. These nanowires were electrically contacted to pre-patterned microelectrodes by means of Focused Ion Beam (FIB) nanofabrication methodologies. The performance of these sensors, which exhibit reproducible and stable responses, was evaluated as function of different gas atmospheres and dissipated power by the heater, demonstrating that this technological approach could be used to develop functional devices based on nanomaterials.

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13 Accurate estimation of the real temperature of the nanowires is complex since uncontrolled self-heating effects on these nanostructures should be considered. For this reason, in this work only dissipated power and nominal temperatures at the centre of the membrane are mentioned.

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Bottom-up Fabrication of Individual SnO2 Nanowires-based Gas Sensors on Suspended Micromembranes

  • Albert Romano-Rodriguez (a1), Francisco Hernandez-Ramirez (a2), Joan Daniel Prades (a3), Albert Tarancon (a4), Olga Casals (a5), Roman Jimenez-Diaz (a6), Miguel Angel Juli (a7), Juan Ramon Morante (a8), Sven Barth (a9), Sanjay Mathur (a10), Andreas Helwig (a11), Jan Spannhake (a12) and Gerhard Mueller (a13)...

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