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Bending Response of a 100nm Thick Free Standing Aluminum Cantilever Beam

Published online by Cambridge University Press:  10 February 2011

M. Taher ,
A. Saif  and
Aman Haque
M. Taher
Affiliation:
Mechanical and Industrial Engineering, University of Illinois1206 West Green Street, Urbana, IL 61801, saif@uiuc.edu
A. Saif
Affiliation:
Mechanical and Industrial Engineering, University of Illinois1206 West Green Street, Urbana, IL 61801, saif@uiuc.edu
Aman Haque
Affiliation:
Mechanical and Industrial Engineering, University of Illinois1206 West Green Street, Urbana, IL 61801, saif@uiuc.edu
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Abstract

A micro instrument is developed to apply force on free standing cantilever samples with suborm thickness. The objective is to study the effect of small thickness on the strength of materials when subjected to bending. The instrument consists of a MEMS actuator, 2mm × 3mm in size, and 20μm deep. It is employed to study an annealed Al cantilever sample, 110nm thick, 2μm wide and 15μm long, fabricated by evaporation. The sample yields at 841M Pa during the first cycle of loading. It is then unloaded and reloaded, when yielding occurs at 1200M Pa. To the best of our knowledge, this is the first reported experiment on free standing submicron metal film subjected to bending.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 594: Symposium V – Thin Films - Stresses & Mechanical Properties VIII , 1999 , 207
Copyright
Copyright © Materials Research Society 2000

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References

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