Skip to main content Accessibility help

The atomic scale removal mechanism during chemomechanical polishing of Silicon: An atomic force microscopy study

  • Futoshi Katsuki (a1) and Junji Watanabe (a2)


The pressure dependence of the microwear of an oxidized Si surface under aqueous electrolyte solutions has been investigated using an atomic force microscope with a single crystal Si tip. The removal ratio of Si tip to SiO2 surface is found to be highly sensitive to the contact pressure. We present a microscopic removal mechanism which is determined by an interplay of the diffusion of H2O in Si and SiO2.



Hide All
1. Mendel, E., Solid State Technol. 10, 27 (1967).
2. Patrick, W.J., Guthrie, W.L., Standley, C.L. and Schiable, P.M., J. Electrochem. Soc. 138, 1778 (1991).
3. Fusstetter, H., Schnegg, A., Graf, D., Kirschner, H., Brohl, M. and Wagner, P., Mater. Res. Soc. Symp. Proc. 386, 97 (1995).
4. Pietsch, G.J., Higashi, G.S. and Chabal, Y.J., Appl. Phys. Lett. 64, 3115 (1994).
5. Karaki, T., Miyake, S. and Watanabe, J., Bull. Japan Soc. of Prec. Eng. 12, 207 (1978).
6. kaneko, R., Miyamoto, T. and Hamada, E., “Microwear”, Handbook of Micro/Nano Tribology, ed. Bhushan, B. (CRC Press, 1995) pp.183221.
7. Manne, S., Butt, H.H., Gould, S.A.C. and Hansma, P.K., Appl. Phys. Lett. 56, 1758 (1990).
8. Katsuki, F., Kamei, K., Saguchi, A., Takahashi, W. and Watanabe., J., J. Electrochem. Soc. 147, 2328 (2000).
9. Katsuki, F., Saguchi, A., Takahashi, W. and Watanabe, J., Jpn. J. Appl. Phys. 41, 4919 (2002).
10. Cook, L. M., J. Non-Cryst. Solids 120, 152 (1990).
11. Graf, D., Grundner, M. and Schulz, R., J. Vac. Sci. & Technol. A7, 807(1989).
12. Nogami, M. and Tomozawa, M., J. Am. Ceram. Soc. 67, 151 (1984).
13. Trogolo, J.A. and Rajan, K.: J. Mater. Sci. 29, 4454 (1994).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed