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Atomic Layer and Unit-Cell Layer Growth of (Ca,Sr)CuO2 and Bi2Sr2Can-1CunO2n+4 Thin Films by Laser Molecular Bean Epitaxy

  • Masaki Kanai (a1), Tomoji Kawai (a1), Takuya Matsumoto (a1) and Shichio Kawai (a1)

Abstract

Thin films of (Ca,Sr)CuO2 and Bi2Sr2Can-1CunO2n+4 are formed by laser molecular beam epitaxy with in-situ reflection high energy electron diffraction observation. The diffraction pattern shows that these materials are formed with layer-by-layer growth. The change of the diffraction intensity as well as the analysis of the total diffraction pattern makes It possible to control the grown of the atomic layer or the unit-cell layer.

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1) Slegrist, T., Zahurak, S.M., Murphy, D.W. and Roth, R.S., Nature 334, 231 (1988).
2) Kanai, M., Kawai, T. and Kawal, S., Appl.Phys.Lett. 58, 771 (1991).
3) Shlom, D.G., Ecksteln, J.N., Bozovic, I., Chen, Z.J., Marshall, A.F., von Dessonneck, K.E. and Harris, J.S., SPIE proceeding, 1285, 234 (1990)

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