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Area-Dependent Switching in Thin Film-Silicon Devices

  • Jian Hu (a1), Warren Jackson (a2), Scott Ward (a1), Pauls Stradins (a1), Howard M. Branz (a1) and Qi Wang (a1)...


We report on the area dependence of switching in both Cr/p +a-Si:H/Ag(Al) and Cr/p +μc-Si/Ag(Al) filament switches. The doped amorphous (a-Si:H) or microcrystalline (μc-Si) thin Si layers are made by hot-wire chemical vapor deposition. The device active region area (A) is varied over 5 orders of magnitude, from 10-7 to 10-2 cm2, using photolithographically defined Ag and Al top contacts. Before switching, the resistance of 100-μm2 devices is normally about 100 kΩ for μc-Si and 10 GΩ for a-Si:H. After switching with applied current ramps, the resistance decreases to a few hundred ohms in all a-Si devices and to a few thousands ohms in μc-Si devices. In both μc-Si and a-Si:H devices, the switching voltage (Vsw) decreases with increasing device area according to Vsw ~ V0-αln(A/A0) with α=0.3V for a-Si:H and α=0.04V for μc-Si. For both materials, the switching current roughly obeys the power law Isw ∞ Aβ with β~1. A statistical model is proposed to explain the area scaling of the switching voltage and relate the parameters to the material properties.



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[1] Hajto, J., Owen, A. E., Snell, A. J., LeComber, P. G., and Rose, M. J., Amorphous and Crystalline Semiconductor Devices, edited by Kanicki, J., (Artech House, 1992), p. 641. See also references cited therein.
[2] Jafar, M. and Haneman, D., Phys. Rev. B 49, 13611 (1994)
[3s] Gordon, K. and Wong, R., IEEE IEDM Tech. Dig., 27 (1993)
[4] Snell, A. J., LeComber, P. G., Hajto, J., Rose, M. J., Owen, A. E., and Osborne, I. S., J. NonCryst. Solids, 137&138, 1257 (1991)
[5] Hu, J., Branz, H.M., Crandall, R.S., Ward, S., Perkins, C. and Wang, Q., Res. Soc. Symp. Proc. vol.715, pp.763 (2002)
[6] Mahan, A. H., Carapella, J., Nelson, B.P., Crandall, R. S., and Balberg, I., J. Appl. Phys., 69, 6728 (1991)


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