Skip to main content Accessibility help

Applications of PZT and Related Thin Films in Piezoelectric Microsensors

  • D. L. Polla (a1), C. Ye (a1), P. Schiller (a1), T. Tamagawa (a1), W. P. Robbins (a1), D. Glumac (a1) and C.-C. Hsueh (a2)...


Ferroelectric thin films have been deposited on polycrystalline silicon micromechanical structures to form both physical microsensors and microactuator devices. These devices which include acoustic pressure sensors, infrared detectors, micropositioners, and stepper motors are based on either the piezoelectric or pyroelectric properties of sol-gel Pb(ZrxTi1-x)O3 or PbTiO3 deposited on surface-machined microelectromechanical structures. Several materials, micromachining, process integration, and performance issues are introduced in the description of these devices.



Hide All
[1]Kim, E. S. and Muller, R.S., IEEE Electron Dev. Lett., EDL–7, 254, (1987).
[2]Chen, P-L., Muller, R. S., Jolly, R. D., Halac, G. L., White, R. M., Andrews, A. P., Lim, T. C., and Motamedi, M. E., IEEE Trans. Electron. Dev., ED–29, 27, (1982).
[3]Wenzel, S. W. and White, R. M., IEEE Trans. Electron Dev., ED–35, 735 (1988)
[4]Tamagawa, T., Polla, D. L., and Hsueh, C.-C., IEEE International Electron Devices Meeting, San Francisco, Technical Digest, p. 617, Dec. (1990).
[5]Tjhen, W., Ye, C.-P., Schiller, P., Tamagawa, T., and Polla, D. L., 4th IEEE Workshop on Micro Electro Mechanical Systems, Nara, Japan, Proceedings, p 114, (1991).
[6]Polla, D. L., Ye, C., and Tamagawa, T., “Surface-Micromachined PbTiO3 Pyroelectric Detectors,” Appl. Phys. Lett., Dec. (1991).
[7]Robbins, W. P., Polla, D.L., Tamagawa, T., and Glumac, D. E., Sixth International Conference on Solid-State Sensors and Actuators, San Francisco, CA, Technical Digest, p. 55, (1991).
[8]Hsueh, C.-C., Tamagawa, T., Ye, C., Helgeson, A., and Polla, D. L., Ferroelectrics, (1991).
[9]Choi, J., “GaAs Integrated Microsensors,” submitted for publication.
[10]Ye, C., Tamagawa, T., Lin, Y., and Polla, D. L., “Pyroelectric Microsensors by Sol-Gel Derived PbTiO3 and La-PbTiO3 Thin Films,” (1 1.9), Fall Mtg. of the Mater. Res. Soc., Boston, MA. (1991).
[11]Moroney, R. M., White, R. M. and Howe, R. T., IEEE Ultrasonics Symposium, Montreal, Canada, October, (1989).
[12]Flynn, A. M., Tavrow, L. S., Bart, S. F. and Brooks, R. A., Ehrlich, D. J., Udayakumar, K. R. and Cross, L. E., IEEE Ultrasonics Symposium, Honolulu, HI, Proceedings, Vol. 3, p. 1163, (1990).
[13]Udayakumar, K. R., Bart, S. F., Flynn, A. M., Chen, J., Tavrow, L. S., Cross, L. E., Brooks, R. A., Ehrlich, D. J., IEEE Micro Electro Mechanical Systems,Nara, Japan, Proceedings, p. 109, (1991).
[14]Robbins, W. P., IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control, UFFC–38, 461, (1991).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed