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Anomalous Carbon Interdiffusion in a-Si:H/a-SiC:H Multilayers

  • R. Schwarz (a1), T. Fischer (a1), P. Hanesch (a1), J. Lanz (a1), W. Schirmacher (a1), J. Kolodzey (a2), G. Zorn (a3) and H. Goebel (a3)...

Abstract

The interdiffusion of carbon in a-Si:H and a-Si1-xCx:H multilayers is measured by analyzing the time evolution of the X-ray diffraction from the superlattices. A time dependent diffusivity D(t)which follows a power law is found. The theoretical analysis shows that such a time dependence, referred to as “dispersive” or “anomalous” diffusion and studied for hydrogen diffusion in the literature, is fundamentally related to the amorphous structure of the material.

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Anomalous Carbon Interdiffusion in a-Si:H/a-SiC:H Multilayers

  • R. Schwarz (a1), T. Fischer (a1), P. Hanesch (a1), J. Lanz (a1), W. Schirmacher (a1), J. Kolodzey (a2), G. Zorn (a3) and H. Goebel (a3)...

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