Skip to main content Accessibility help
×
Home

Anodic Bonding at Room Temperature

  • Volker Baier (a1), Andreas Gebhardt (a2) and Stefan Barth (a3)

Abstract

Special phosphate glasses (niobium-phosphate glasses) are used for anodic bonding experiments. They are optimized particularly with regard to elevated alkali ion conductivity at room temperature due to high contents of Li or Na ions. The compounds anodically bonded at room temperature show the strength of the breakage of the glass. Only a few seconds up to a few minutes at voltages of maximum 500 V are necessary for bonding. The glasses have a thermal expansion coefficient, which is not fitted to that of silicon. Therefore, stability of the bonded compounds is achieved only at temperature jumps up to 100 K in the case of bulk samples. For higher temperature jumps the probability of breakage increases continuously. It is possible to get thin films of these glasses with ac and dc magnetron sputter techniques for example on silicon. These thin layers are anodically bondable and the compounds with silicon show a higher temperature stability (at least 233 to 473 K).

Copyright

References

Hide All
1 Shoji, S., Kikuchi, H., Torigoe, H., Sensors and Actuators A 64, 95100, (1998)
2 Baier, V., D. Hülsenberg, Schmidt, K., Straube, B., DE Patent 195 45 422 (6 Dezember 1995)
3 Barth, S., Feltz, A., Solid State Ionics 34, 4145 (1989)
4 Baier, V., Gebhardt, A., Barth, S., DE Patent pending, submitted on 27.10.2000

Related content

Powered by UNSILO

Anodic Bonding at Room Temperature

  • Volker Baier (a1), Andreas Gebhardt (a2) and Stefan Barth (a3)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.