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Anisotropy of Aluminum Porous Anodization Process for Vlsi Planar Metallization

  • S. Lazarouk (a1), I. Baranov (a1), G. de Cesare (a2), G. Maiello (a2), E. Proverbio (a2) and A. Ferrari (a2)...

Abstract

In this work factors affecting the anisotropy (i.e., difference in vertical and lateral anodization rates) of the aluminum anodization process are investigated. By varying the electrochemical process parameters, a degree of anisotropy of about 0.6 was obtained. The structure of the aluminum porous oxide was determined by a Scanning Electron Microscope. The difference in the anodization conditions for porous aluminum oxide growth along lateral and vertical direction was determined. The developed processing technique was used for forming multilevel VLSI metallization with feature sizes of about 1.2 µm.

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1 Malik, F., Thin Solid Films, 206 (1991), p.70.
2 Schwartz, G.C. and Platter, V., J. Electrochem. Soc., 123 (1976) p.34.
3 Sze, S.M.:“Semiconductor devices: physics and technology”, Bell Lab, New Jersey, 1985
4 Schwartz, G.C. and Platter, V., J. Electrochem. Soc., 122 (1975) p.1508.
5 Ehara, K., Morimoto, T., Martino, S., J. Electrochem. Soc, 131, (1984) p. 419
6 Young, L. “Anodic oxide films”, Academic Press, London, 1960
7 Lohrengel, M. M., Mat. Sci. Eng., R 11 N. 6, (1993) p. 243
8 Thompson, G. E., Xu, Y., Skeldon, P., Shimizu, K., and Wood, G. C., Phil. Mag. A, 55, (1987), p. 651
9 Shimizu, K., Thompson, G.E., Wood, G.C., Electrochim. Acta, 27 N.2, (1982), p. 245
10 O’Sullivan, J. P. and Wood, G. C., Proc. Roy. Soc. Lond. A. 317, (1970), p. 511
11 Lazarouk, S., Ph. D Thesis, (1986), Radioengineering Institute, Minsk
12 Labunov, V. A., Baranov, I. L., Lazarouk, S. K., Proceedings of the International Conference “Microelectronic ‘90”, p. 146, Minsk (1990)

Anisotropy of Aluminum Porous Anodization Process for Vlsi Planar Metallization

  • S. Lazarouk (a1), I. Baranov (a1), G. de Cesare (a2), G. Maiello (a2), E. Proverbio (a2) and A. Ferrari (a2)...

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