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Analysis on interface layer between Pt electrode and ferroelectric layer of solution-processed PZT capacitor

  • Thanh V Pham (a1), Trinh N Q Bui (a2), Tue T Phan (a1), Takaaki Miyasako (a2), Eisuke Tokumitsu (a2) (a3) and Tatsuya Shimoda (a1) (a2)...


Pt/Pb(Zr0.4Ti0.6)O3 (PZT)/Pt capacitors were prepared by the sol-gel technique and their electric properties were analyzed. The asymmetry of polarization-electric field (P-E) and capacitor-voltage (C-V) curves exhibits existence of an interface layer (dead-layer) between top Pt electrode and PZT thin film. By conducting temperature dependant measurement, the Pt/PZT/Pt capacitor was confirmed to be Schottky emission conduction. In addition, barrier height of PZT contact calculated 0.67eV. On basic a series capacitors model and Schottky contact of Pt/PZT interface, the thickness and the dielectric constant of this dead-layer were estimated to be 6.4 nm and 170, respectively. Moreover, the dielectric constant of 900 was obtained for the real PZT ferroelectric layer. The existence of the dead-layer was also confirmed by the high resolution transmission electron microscopy (HR-TEM) observation and the energy dispersive X-ray (EDX) analysis on PZT ferroelectric layer in the Pt/PZT/Pt structure. Based on EDX analysis result, a 10-nm layer at Pt/PZT contact was suggested to be the dead-layer.



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