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Analysis of Stress Variations in Epitaxial Films Using Cathodoluminescence Microscopy and Spectroscopy

Published online by Cambridge University Press:  16 February 2011

B. G. Yacobi  and
P. Sheldon
B. G. Yacobi
Affiliation:
Gatan Research and Development, Pleasanton, CA 94588
P. Sheldon
Affiliation:
Solar Energy Research Institute, Golden, CO 80401
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Abstract

This paper presents experimental results of a new application of cathodoluminescence microscopy in the analysis of stress variations in epitaxial layers. Cathodoluminescence microscopy and spectroscopy techniques, in conjunction with the known behavior of the optical transitions in the presence of stress, can be effectively used for both the qualitative and quantitative analyses of spatial variations of stress in epitaxial films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 188: Symposium K – Thin Films: Stresses and Mechanical Properties II , 1990 , 47
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

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