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Analysis of Microfabricated Textured Multicrystalline Beams: I. Homogenization Approach

Published online by Cambridge University Press:  15 February 2011

Dariush Mirfendereski ,
Mauro Ferrari  and
Armen Der Kiureghian
Dariush Mirfendereski
Affiliation:
Department of Civil Engineering, University of California, Berkeley CA 94720.
Mauro Ferrari
Affiliation:
Department of Civil Engineering, University of California, Berkeley CA 94720. also, Department of Materials Science and Mineral Engineering.
Armen Der Kiureghian
Affiliation:
Department of Civil Engineering, University of California, Berkeley CA 94720.
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Abstract

This paper discusses a deterministic approach to the stress and deformation analysis of miniaturized structures. Analytical Voigt-Reuss-Hill averages for the elements of the fourth-ranked elasticity tensor representing a polycrystal are evaluated for a planar problem and the variations of elastic moduli with respect to the degree of anisotropy and the mean and coefficient of variation of the preferred orientation direction are studied. The applicability of the averaging methods to the characterization of materials used in micro-electro-mechanical systems are then assessed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 91
Copyright
Copyright © Materials Research Society 1992

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References

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