Skip to main content Accessibility help
×
Home

Analysis of growth rate of silicon nanowires

  • J. Kikkawa (a1), Y. Ohno (a1) and S. Takeda (a1)

Abstract

We have measured the growth rate of silicon nanowires (SiNWs) in the diameter range of 3 to 40 nm (8.4 nm on average), which were grown by chemical vapor deposition (CVD) at temperatures between 365 °C and 495 °C. It is found that SiNWs with smaller diameters grow slower than those with larger ones, and a critical diameter at which growth stops completely exists. The growth rate of the thinner SiNWs stronger depends on growth temperature than that of thicker ones in previous studies. We discuss the dependence by thermodynamics theory.

Copyright

References

Hide All
1. Morales, A. M. and Lieber, C. M., Science 279, 208 (1998).
2. Ozaki, N., Ohno, Y. and Takeda, S., Appl. Phys. Lett. 73, 3700 (1998).
3. Givargizov, E. I., J. Cryst. Growth 31, 20 (1975).
4. Bootsma, G. A. and Gassen, H. J., J. Cryst. Growth 10, 223 (1971).
5. Lew, K.-K. and Redwing, J. M., J. Cryst. Growth 254, 14 (2003).
6. Takeda, S., Ueda, K., Ozaki, N. and Ohno, Y., Appl. Phys. Lett. 82. 979 (2003).
7. Onischuk, A. A., Strunin, V. P., Ushakova, M. A. and Panfilov, V. N., Int. J. Chem. Kinet. 30, 99 (1998).
8. Westwater, J., Gosain, D. P., Tomiya, S. and Usui, S., J. Vac. Technol. B 15, 554 (1997).
9. submitting for publication (2004).
10. Purnell, J. H. and Walsh, R., Proc. R. Soc. A 293, 543 (1966).
11. Meyerson, B. S. and Jasinski, J. M., J. Appl. Phys. 61, 785 (1987).
12. Dubois, L. H. and Nuzzo, R. G., J. Vac. Sci. Technol. A 2, 441 (1984).
13. Decker, C. A., Solanki, R., Freeouf, J. L., Carruthers, J. R. and Evans, D. R., Appl. Phys. Lett. 84, 1389 (2004).
14. Tan, T. Y., Li, N. and Gösele, U., Appl. Phys. Lett. 83, 1199 (2003).

Analysis of growth rate of silicon nanowires

  • J. Kikkawa (a1), Y. Ohno (a1) and S. Takeda (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed