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Analysis of Geometrical and Microstructural Effects on Void Formation in Metallization: Observation and Modelling

  • W. C. Shih (a1), A. Ghiti (a2), K. S. Low (a2), A. L. Greer (a1), A. G. O'Neill (a2) and J. F. Walker (a3)...

Abstract

This paper reports the analysis of geometrical and microstructural effects on void formation in interconnects. Ion-beam machining is used to define segments for study at the cathode end of test lines. Scanning electron microscopy is used to observe damage development, focused ion beam microscopy to observe the corresponding grain structure. Finite-element calculations of self-consistent current density and temperature distributions in the conductor are used to predict damage locations both for a continuum material and for simulated grain structures. Cross-section changes in the line give temperature variations leading to divergences in atomic flux. Regions of high flux divergence are favoured for electromigration damage, but the precise sites of damage are determined by the grain structure, as shown both in the experiment and in the modelling.

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Analysis of Geometrical and Microstructural Effects on Void Formation in Metallization: Observation and Modelling

  • W. C. Shih (a1), A. Ghiti (a2), K. S. Low (a2), A. L. Greer (a1), A. G. O'Neill (a2) and J. F. Walker (a3)...

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