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An X-Ray Scattering Study of Amorphous Hydrogenated Carbon

  • T.M. Burke (a1), D.W. Huxley (a1), R.J. Newport (a1), G. Bushnell-Wye (a2) and J. Franks (a3)...

Abstract

The structure of “diamond-like” carbon, a-C:H has been studied using the Xray diffraction facilities available at the Synchrotron Radiation Source (Daresbury Lab, UK). The principle advantage of using the SRS is that high fluxes are available at short wavelengths (λ ∼ 0.6Å): it is therefore possible to extract the “diffuse” scattering profile associated with all amorphous systems with considerable precision over a very wide K-range. A novel diffraction technique is also described in which the X-ray beam is incident on an as-deposited thin film at or near the critical angle. In this geometry we demonstrate that it is possible to gather diffraction data on -1μm films in-situ.

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References

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1. Evans, A.C., Franks, J. and Revell, P.J., Med. Device Technol, May '92, 26.
2. Angus, J.C., Koidl, P. and Domitz, S.Plasma Deposited Thin Films” (Chapter 4), CRC Press (1986).
3. Lim, G., Parrish, W., Ortiz, C., Belloto, M. and Hart, M., J. Mater. Res. 2, 471 (1987).
4. Cernikand, R. Hart, M., Nucl. Instr. Meth., A281, 403 (1989).
5. Huxley, D., Newport, R., Howells, W. and Franks, J., MRS Spring'92 Meeting Proc.
6. Bushnell-Wye, G. et al. , Rev. Sd. Instr., 63, 1153 (1992).

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