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An Overview of Laser Chemical Processing

  • Richard M. Osgood (a1)


A overview of the recent developments in laser chemical processing is provided. The review covers advances in understanding fundamental process physics, the development of new techniques, and the implementation of applications.



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19. Osgood, R.M., Brewer, P., Holber, W., Chu, J., Evans, H., Yang, E., and Chen, J., Extended Abstracts, MRS Symposium on the Beam-Induced Chemical Processes, Boston, 1984; P.B. Brewer, D. McClure, and R.M. Osgood, Jr., Appl. Phys. Letts. 49, 13 (1986).
20. Hayasaka, N., Okano, H., Sekine, M., and Horiike, Y., Appl. Phys. Letts. 48, 1166 (1986); projection etching is described in Y. Horiike, Appl. Phys. (to be published).
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30. See, for example, Tuckerman, D.B. and Weisberg, A.H., IEEE Electron Device Lett. EDL–7, 1 (1986).
31. Introduction in Laser Diagnostics and Photochemical Processing for Semiconductor Devices, R.M., Osgood, S.R.J., Brueck, and H.R., Schlossberg (eds.), North Holland: New York (1983).

An Overview of Laser Chemical Processing

  • Richard M. Osgood (a1)


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