Hostname: page-component-7479d7b7d-8zxtt Total loading time: 0 Render date: 2024-07-13T23:00:14.203Z Has data issue: false hasContentIssue false

An overview of Analytical Electron Microscopy

Published online by Cambridge University Press:  21 February 2011

D. B. Williams*
Affiliation:
Department of Metallurgy & Materials Engineering, Whitaker Lab #5 Lehigh University, Bethlehem, pa 18015
Get access

Abstract

Analytical electron microscopy techniques comprising imaging, chemical analysis and microdiffraction are described together with details of the instrumentation required. Using the analytical electron microscope (AEM), the materials scientist can gain combined chemical and crystallographic information with a spatial resolution and sensitivity not available in other imaging instruments. Examples of the application of the AEM to determine solute distribution and crystal structure data are given.

Type
Research Article
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Hren, J. J., Goldstein, J. I. and Joy, D. C., eds., Introduction to Analytical Electron Microscopy (Plenum, New York 1979. Revised edition 1984.)CrossRefGoogle Scholar
2. Williams, D. B., Practical Analytical Electron Microscopy in Materials Science (Philips Electronic Instruments, New Jersey 1984).Google Scholar
3. Crewe, A. V., Wall, J. and Langmore, J., Science 168, 1338 (1970).CrossRefGoogle Scholar
4. Chan, I. Y. T., Cowley, J. M. and Carpenter, R. W. in: Analytical Electron Microscopy-1981, Geiss, R. H., ed. (San Francisco Press 1981), 107.Google Scholar
5. Cowley, J. M., Appl. Phys. Lett. 15, 58 (1969).Google Scholar
6. Maher, D. M. and Joy, D. C., Ultramicroscopy 1, 239 (1976).Google Scholar
7. Brown, L. M., J. Phys. F: Metal Physics 11, 1 (1981).CrossRefGoogle Scholar
8. Cosslett, V. E., Phys. Stat. Sol. A 55, 545 (1979).Google Scholar
9. Williams, D. B. and Goldstein, J. I. in: Analytical Electron Microscopy-1981, Geiss, R. H. ed. (San Francisco Press 1981), 39.Google Scholar
10. Nockolds, C., Nasir, M. J., Cliff, G. and Lorimer, G. W. in: Electron Microscopy and Analysis 1979, Mulvey, T., ed. (The Institute of Physics, Bristol 1980), 417.Google Scholar
11. Zaluzec, N. J. in Reference [1], 121.Google Scholar
12. Williams, D. B. and Goldstein, J. I. in: Energy Dispersive Spectrometry (NBS Special Publication No. 604 Washington, D.C., 1981), 341.Google Scholar
13. Thomas, L. E. in: Microbeam Analysis-1983, Gooley, R., ed. (San Francisco Press 1983), 70.Google Scholar
14. Mehta, S., Goldstein, J. I., Williams, D. B. and Romig, A. D. in: Microbeam Analysis-1979, Newbury, D. E., ed. (San Francisco Press 1979), 119.Google Scholar
15. Cliff, G. and Lorimer, G. W., J. Microsc. 103, 203 (1975).Google Scholar
16. Wood, J., Williams, D. B. and Goldstein, J. I. in: Quantitative Microanalysis with High Spatial Resolution, Lorimer, G. W., Jacobs, M. H. and Doig, P., eds. (The Metals Society, London 1981), 24.Google Scholar
17. Goldstein, J. I., Costley, J. L., Lorimer, G. W. and Reed, S. J. B. in: SEM/1977 1, Johari, O., ed. (IITRI, Chicago 1977), 315.Google Scholar
18. Maher, D. M., Joy, D. C., Ellington, M. B., Zaluzec, N. J. and Mochel, P. E. in: Analytical Electron Microscopy-1981, Geiss, R. H., ed. (San Francisco Press 1981), 33.Google Scholar
19. Wood, J. E., Williams, D. B. and Goldstein, J. I., J. Microsc. in press (1983).Google Scholar
20. Romig, A. D. and Goldstein, J. I. in: Microbeam Analysis-1979, Newbury, D. E., ed. (San Francisco Press 1981), 124.Google Scholar
21. Williams, D. B., Goldstein, J. I. and Michael, J. R. in: Microbeam Analysis-1982, Heinrich, K. F. J., ed. (San Francisco Press 1982), 21.Google Scholar
22. Joy, D. C. and Maher, D. M. in: SEM/1977 1, Johari, O., ed. (IITRI Chicago 1977), 325.Google Scholar
23. Newbury, D. E. in: Microbeam Analysis-1982, Heinrich, K. F. J., ed. (San Francisco Press 1982), 79.Google Scholar
24. Williams, D. B. and Edington, J. W., J. Microsc. 108, 113 (1976).CrossRefGoogle Scholar
25. Joy, D. C. in Reference [1], 223.Google Scholar
26. Burgner, R. P., Krivanek, O. L. and Swann, P. R. in: Proc. 40th EMSA Meeting, Bailey, G. W., ed. (Claitors, Baton Rouge 1982), 650.Google Scholar
27. Egerton, R. F., Ultramicroscopy 3, 243 (1978).CrossRefGoogle Scholar
28. Joy, D. C., Egerton, R. F. and Maher, D. M. in: SEM/1979 2, Johari, O., ed. (AMF O'Hare 1979), 817.Google Scholar
29. Joh, D. C. and Maher, D. M., J. Microsc. 124, 37 (1981).Google Scholar
30. Bentley, J., Lehman, G. L. and Sklad, P. in: Analytical Electron Microscopy-1981, Geiss, R. H., ed. (San Francisco Press 1981), 161.Google Scholar
31. Isaacson, M. and Johnson, D., Ultramicroscopy 1, 33 (1975).Google Scholar
32. Egerton, R. F., Ultramicroscopy 4, 169 (1979).Google Scholar
33. Chen, C. H., Silcox, J. and Vincent, R., Phys. Rev. B 12, 64 (1975).CrossRefGoogle Scholar
34. Teo, B. K. and Joy, D. C., eds., EXAFS Spectroscopy (Plenum, New York 1981).Google Scholar
35. Egerton, R. F., Phil. Mag. 34, 49 (1976).Google Scholar
36. Higgs, A. and Krivanek, O. L. in: Proc. 39th EMSA Meeting, Bailey, G. W., ed. (Claitors, Baton Rouge 1981), 346.Google Scholar
37. Riecke, W. D., Z. Angew. Physik 27, 155 (1969).Google Scholar
38. Grigson, C. W. B., Rev. Sci. Instrum. 36, 1587 (1965).Google Scholar
39. van Oostrum, K. J., Leenhouts, A. and Jore, A., Appl. Phys. Lett. 23, 283 (1972).CrossRefGoogle Scholar
40. Allen, S. M., Phil. Mag. A 43, 325 (1981).Google Scholar
41. Steeds, J. W. in: Quantitative Microanalysis with High Spatial Resolution, Lorimer, G. W., Jacobs, M. H. and Doig, P., eds. (The Metals Society London 1981), 210.Google Scholar
42. Steeds, J. W. in Reference [1], 387.Google Scholar
43. Buxton, B. F., Eades, J. A., Steeds, J. W. and Rackham, G. M., Phil. Trans. Roy. Soc. 281, 181 (1976).Google Scholar
44. Raghavan, M., Koo, J. Y. and Petkovic-Luton, R., J. Metals 35, 44 (1983).Google Scholar
45. Tanaka, M., Saito, R. and Watanabe, D., Acta Cryst. A 36, 350 (1980).Google Scholar
46. Fung, K. K., McKernan, S., Steeds, J. W. and Wilson, J. A., J. Phys. C.: Solid State Physics 14, 5417 (1981).Google Scholar
47. Shaw, M. P., Ecob, R. C., Porter, A. J. and Ralph, B. in: Quantitative Microanalysis with High Spatial Resolution, Lorimer, G. W., Jacobs, M. H. and Doig, P., eds. (The Metals Society London 1981), 229.Google Scholar