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An in-situ TEM Nanoindenter System with 3-axis Inertial Positioner

Published online by Cambridge University Press:  10 February 2011

M.S. Bobji ,
C.S. Ramanujan ,
R.C. Doole ,
J.B. Pethica  and
B.J. Inkson
M.S. Bobji
Affiliation:
Department of Materials, University of Oxford, Oxford, OX1 3PH, U.K.
C.S. Ramanujan
Affiliation:
Department of Materials, University of Oxford, Oxford, OX1 3PH, U.K.
R.C. Doole
Affiliation:
Department of Materials, University of Oxford, Oxford, OX1 3PH, U.K.
J.B. Pethica
Affiliation:
Department of Materials, University of Oxford, Oxford, OX1 3PH, U.K.
B.J. Inkson
Affiliation:
Dept. of Engineering Materials, University of Sheffield, Sheffield, S1 3JD, U.K.
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Abstract

To quantify the mechanical properties and deformation behaviour of sub-micron wires, an in-situ nanoindenter system is being developed for a TEM. The miniaturized displacement controlled nanoindenter fits inside a side entry specimen holder. For coarse positioning, a novel 3-axis inertial positioner has been developed. This positioner has a range of 5mm with a 300 nm resolution. The fine displacements are generated by means of a tube piezo and the force is measured using a fibre optic interferometer.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 778: Symposium U – Mechanical Properties Derived from Nanostructuring Materials , 2003 , U4.5
Copyright
Copyright © Materials Research Society 2002

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