Hostname: page-component-848d4c4894-pjpqr Total loading time: 0 Render date: 2024-07-07T02:48:20.816Z Has data issue: false hasContentIssue false
  • English
  • Français

Amorphous Carbon Nitride Films as a Candidate for Low Dielectric Constant Materials

Published online by Cambridge University Press:  10 February 2011

M. Aono ,
S. Nitta ,
T. Iwasaki ,
H. Yokoi ,
T. Itoh  and
S. Nonomura
M. Aono
Affiliation:
Department of Electrical Engineering, Gifu University, 1–1 Yanaido, Gifu, Japan 501–1193
S. Nitta
Affiliation:
Department of Electrical Engineering, Gifu University, 1–1 Yanaido, Gifu, Japan 501–1193
T. Iwasaki
Affiliation:
Department of Electrical Engineering, Gifu University, 1–1 Yanaido, Gifu, Japan 501–1193
H. Yokoi
Affiliation:
Department of Electrical Engineering, Gifu University, 1–1 Yanaido, Gifu, Japan 501–1193
T. Itoh
Affiliation:
Department of Electrical Engineering, Gifu University, 1–1 Yanaido, Gifu, Japan 501–1193
S. Nonomura
Affiliation:
Renewable Energy Systems, Gifu University, 1–1 Yanaido, Gifu, Japan 501–1193
Get access

Abstract

We have succeeded to prepare high resistivity and rather low dielectric constant amorphous carbon nitride films a-CNx (0.52<x<0.86) by the reactive radio frequency magnetron sputtering of a graphite target using nitrogen molecules as a sputter gas.

The resistivity of a-CNx are 5×1016 to 1017 Ω-cm and be estimated to 1020 Ω-cm, when the ratio of the carbon and nitrogen becomes chemically stoichiometry 3 to 4, i.e. C3N4. The resistivity of a-CNx films prepared by a layer-by-layer method, LL-a-CNx, is 1018 Ω -cm for x=0.6. The layer-by-layer method is a cyclic process of a deposition by the sputtering and an etching by atomic hydrogen. The sample LL-a-CNx made by a layer-by-layer method are compared with that of usual method a-CNx. The dielectric constant of a-CNx films calculated from the refractive index n are 3.6 to 2.8 corresponds to nitrogen contents, 0.52<x<0.86. The dielectric constants ε of a-CNx films decrease with the content of nitrogen x. At an ultimate component of a-CNx, at x=4/3, the dielectric constant is estimated to 1.8.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 565: Symposium O – Low-Dielectric Constant Materials V , 1999 , 291
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Chiang, C., et al. : “Low-Dielectric Constant Materials IV”, MRS Symposium Proceedings Vol. 511, 1998.Google Scholar
[2] Nitta, S., Takada, N., Sugiyama, K., Itoh, T. and Nonomura, S.: J. Non-Crystalline Solids 227–230, (1997) 655–658.Google Scholar
[3] Takada, N., Arai, K., Nitta, S. and Nonomura, S.: Applied Surface Science 113/114, (1997) 274.10.1016/S0169-4332(96)00772-6Google Scholar
[4] Iwasaki, T., Aono, M., Nitta, S., Itoh, T. and Nonomura, S.: Diamond and Related Materials (1999) in print.Google Scholar