Skip to main content Accessibility help
×
Home

AlGaN Microwave Power HFETs on Insulating SiC Substrates

  • Gerry Sullivan (a1), Ed Gertner (a1), Richard Pittman (a1), Mary Chen (a1), Richard Pierson (a1), Aiden Higgins (a1), Qisheng Chen (a2), Jin-Wu Yang (a3), R. Peter Smith (a4), Raul Perez (a4), Abdur Khan (a4), Joan Redwing (a5) and Brian McDermott (a5)...

Abstract

AIGaN HFETs are attractive devices for high power microwave applications. Sapphire, which is the typical substrate for AlGaN epitaxy, has a very poor thermal conductivity, and the power performance of AlGaN HFETs fabricated on sapphire substrates is severely limited due to this large thermal impedance. We report on HFETs fabricated on high thermal conductivity electrically insulating SiC substrates. Excellent RF power performance for large area devices is demonstrated. On-wafer CW measurements at 10 GHz of a 320 micron wide FET resulted in an RF power density of 2.8 Watts/mm, and measurements of a 1280 micron wide FET resulted in a total power of 2.3 Watts. On-wafer pulsed measurements, at 8 GHz, of a 1280 micron wide FET resulted in a total power of 3.9 Watts. Design of a hybrid microwave amplifier will be discussed.

Copyright

References

Hide All
1- Allen, S.T., Pribble, W.L., Sadler, R.A., Alcorn, T.S., Ring, Z. and Palmour, J.W., Recent Progress in SiC Microwave MESFETs, Spring MRS Conference, Talk Y1.2, San Francisco, 1999.10.1557/PROC-572-15
2- Yu, E. T., Dang, X. Z., Asbeck, P. M., Lau, S. S. and Sullivan, G. J., “Spontaneous and piezoelectric polarization effects in Ill-V nitride heterostructures”, to appear in J. Vac. Sci. and Tech., June/July 1999.10.1116/1.590818

AlGaN Microwave Power HFETs on Insulating SiC Substrates

  • Gerry Sullivan (a1), Ed Gertner (a1), Richard Pittman (a1), Mary Chen (a1), Richard Pierson (a1), Aiden Higgins (a1), Qisheng Chen (a2), Jin-Wu Yang (a3), R. Peter Smith (a4), Raul Perez (a4), Abdur Khan (a4), Joan Redwing (a5) and Brian McDermott (a5)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed