Skip to main content Accessibility help
×
Home

Advances in Amorphous Silicon Integrated Photonics Science and Technology

  • G.P. Halada (a1), Samrat Chawda (a1), J. Mawyin (a1), R.J. Tonucci (a2), A.H. Mahan (a3) and C.M. Fortmann (a4)...

Abstract

Over the past few years we have been developing a scientific basis for amorphous silicon-based integrated photonics technology. Waveguides using hydrogen-implanted, optically-smooth, hot-wire-deposited films have been prepared and demonstrated, and structures were characterized by Raman spectroscopy of the implanted and the non-implanted regions of the waveguide samples. The analysis is consistent with greater disorder in the film structure induced through implantation. More recently, materials prepared by femtosecond laser ablation of silicon powder have been characterized by Raman spectroscopy indicating a structure having both amorphous and crystalline components. As amorphous silicon photonics continues to evolve, the patterning of materials of differing crystallinity may become an issue of interest.

Copyright

References

Hide All
1 Rong, Haisheng, Liu, Ansheng, Jones, Richard, Cohen, Oded, Hak, Dani, Nicolaescu, Remus, Fang, Alexander, Paniccia, Mario, Nature. 433, pp. 292294 (2005).10.1038/nature03273
2 Fortmann, C.M. et al., to be published in Thin Solid Films.
3 Hata, N., Stradins, P., Fortmann, C.M., Fujiwara, H., Kondo, M., Matsuda, A., J. of Non-Cryst. Solids, 266-269, p. 491 (2000).10.1016/S0022-3093(99)00783-8
4 Hata, N., Fortmann, C.M., and Matsuda, A. (Mat. Res. Soc. Symp. Proc. 664, Warringdale, PA, 2001) pp. A19.5–A19.5.6.
5 Hata, N., Fortmann, C.M., and Matsuda, A., (Mat. Res. Soc. Symp. Proc. 664, Warringdale, PA, 2001) pp. A12.6–A12.6.6.
6 Nelson, Brent P., Xu, Yueqin, Mahan, A. Harv, Williamson, D.L., and Crandall, R.S., (Mat. Res. Soc. Symp. Proc. 609, San Francisco, CA 2000) pp. A22.8–A22.8.6
7 Fortmann, C.M., Mahan, A.H., Ward, Scott, Anderson, W.A., Tonucci, R., Hata, N., Thin Solid Films. 430, pp. 278282 (2003).10.1016/S0040-6090(03)00134-2
8 Fortmann, C.M., Jaen, E.L., Anderson, W.A., Mahan, A.H., and Hata, N. Photorefractive Fiber and Crystal Devices: Materials, Optical Properties, and Applications V, edited by Yu, Francis T.S., Yin, Shizhuo, Editors, (SPIE. Proc. 4459, San Diego, CA, 2001) pp.1019.
9 Fortmann, C.M., Jaen, E.L., Hata, N., Anderson, W.A., and Mahan, A.H., Thin Solid Films, 395, pp. 142146 (2001).10.1016/S0040-6090(01)01239-1
10 Fukutani, K., Kanbe, M., Futako, W., Kaplan, B., Kamiya, T., Fortmann, C. M., Shimizu, I., J. Non-Cryst. Solids. 227-230, pp. 6367 (1998).10.1016/S0022-3093(98)00022-2

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed