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Advanced Ion Beam Material Processing Projects in Japan

  • Isao Yamada (a1)


R&D projects of ion beam systems and ion beam process technology have been conducted under the National Research and Development Program known as the “Large-Scale project”. The project includes development of five large-scale ion beam systems and their application for surface modifications. Under another program called the National Research Facility Development Project, the Ion Engineering Center Corporation has been established in order to promote industrial applications of ion beam processes. This paper reviews those projects and recent progress on development of large-scale ion beam systems and related materials processing technology. Major research projects which have been funded by the Ministry of Education for ion beam related researches are also reviewed.



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1.Advanced Material-Processing and Machining Technology Research Association, Sumitomo Seimei Shin-Osaka Building South Wing 10F, 5-5-15 , Nishi-Nakajima, , Yodogawa-ku, Osaka 532 Japan.
2. Yamada, I. Nuc. Instr. Methods in Physics Res. B59/60 (1991) 1467.
3. Yamada, I., Surface and Coating Technology (1992), to be published.
4. Interim Evaluation Report on Advanced Material-Processing and Machining Technology by the Industrial Technology Council of the Ministry of International Trade and Industry, Japan., National Development Program Committee, Evaluation Subcommittee, and Interim Evaluation Working Group for Advanced Technology Project (Published in Japanese and English).
5.Association member: Nissin Electric Co., Ltd.
6.Association member: ULVAC Japan, Ltd.
7.Association member: Mitsubishi Electric Corp.
8. Yamada, I., Applied Surface Science, 43 (1989) 23.
9. Yamada, I., Palmstrøm, C.J., Kennedy, E., Mayer, J.W., Inokawa, H. and Takagi, T., in Layered Structures, Epitaxy, and Interfaces, edited by Gibson, J.M. and Dawson, L.R. (Mater. Res. Soc. Proc. 37, Pittsbrgh, PA 1985) pp. 401406.
10. Yamada, I., Takaoka, G.H., Usui, H., Satoh, F., Itoh, Y., Yamashita, K., Kitamoto, S., Namba, Y., Hashimoto, Y., Maeyama, Y. and Machida, K., Nucl. Instr. Methods in Physics Res. B55 (1991) 876.
11. Kawagoe, Y., Yamanishi, K., Imada, K. and Sato, K., Nucl. Instr. Methods in Physics Res. B59/60 (1991) 1426.
12.Association member: JEOL Ltd.
13.Association member: Hitachi, Ltd.
14.Association member: Nippon Sheet Glass Co., Ltd.
15. Tagami, T., Oyoshi, K. and Tanaka, S., in Processing and Characterization of Materials Using Ion Beams, edited by Rehn, L.E., Green, J. and Smidt, F.A. (Mater. Res. Soc. Proc. 128 Pittsburgh, PA 1989) pp. 519524.
16. Oyoshi, K., Tagami, T. and Tanaka, S., Nucl. Instr. Methods in Physics Res. B59/60 (1991) 1324.
17. Oyoshl, K., Tagami, T., and Tanaka, S., J.Appl. Phys. 68 (1990) 3653.
18.Association member: Kobe Steel, Ltd.
19.Association member: Japan Aviation Electronics Industries, Ltd.
20. Kataoka, I., Surface and coating technology (1992) to be published.
21.Ion Engineering Center Corporation, 4547-15 Tsuda, Hirakata, Osaka 573-01, Japan.
22. Yamada, I, Nucl. Instr. and Meth in Physics Res. B55 (1991) 544.
23. Yamada, I., Takaoka, G.H., Usui, H. and Koh, S.K., in Clusters and Cluster-Assembled Materials, edited by Averback, R.S., Bernholc, J, Nelson, D.L (Mater. Res. Soc. Proc. 206, Pittsburgh, PA 1991) pp.383390.

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Advanced Ion Beam Material Processing Projects in Japan

  • Isao Yamada (a1)


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