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Add Ceramic “MEMS” to the Pallet of MicroSystems Technologies

  • David L. Wilcox (a1), Jeremy W. Burdon (a1), Rajnish Changrani (a1), Chia-Fu Chou (a1), Steve Dai (a1), Ramesh Koripella (a1), Manny Oliver (a1), Daniel Sadler (a1), Paul von Allmen (a1) and Frederic Zenhausern (a1)...

Abstract

Just as the 40+ years of technology developments associated with the electronic application of semiconductor fabrication processes is “morphing” into a micro-electro- mechanical systems (MEMS) technology in the past dozen years or so, so it seems may the “mature” multilayer ceramic fabrication technology associated with capacitor components and interconnect substrates for the integrated circuit industry, be morphed into MEMS – microsystems technology applications. This paper highlights work underway in Motorola Labs aimed at exploring the potential to develop 3D multilayer ceramic structures to integrate (monolithic and hybrid) multiple functions to create microsystems for wireless, energy and life science applications. By multiple functions, we refer to the ability for a microsystem to perform electronic, fluidic, thermonic, photonic and mechatronic (or actuator) based functions. Current capabilities of the multilayer ceramic materials and processes to achieve integrated functionalities for wireless applications will be described including the development of a new dielectric enabling increased performance for wireless applications. Also to be highlighted will be exploratory microscale fuel cell prototypes exploiting advances in the multilayer ceramic lamination and feature forming technologies enabling the insertion of 3D microchannels for microfluidic functions. These prototypes also feature the ability of the technology to provide thermonic functionality for microreactor devices. Feasibility of a light source that can be integrated into the technology platform hinting at photonic applications will be described. Many materials science and engineering advancements are needed to achieve the potential of this “old” but newly “morphing” technology and some of these will be noted.

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1 Discussion with Prof. Haim Bau, University of Pennsylvania, 1998
2 Mistler, Richard E., Twiname, Eric R., Tape Casting: Theory and Practice. American Ceramic Society (1999).
3 Blodgett, A.J. Jr., “Microelectronics Packaging”, Scientific American 249, No 1, pp 8996 (July 1983)
4 Teterycz, H., Kita, J., Bauer, R., Golonka, L.J., Licznerski, B.W., Nitsch, K., Wiśniewski, K., New design of SnO2 gas sensor on Low Temperature Cofiring Ceramics, Sensors and Actuators B, vol.47/1–3, 1998, pp. 100103.
5 Wang, Peng, Liu, Yanquing and Jones, W. Kinzy, “New approaches to Thermal Management in LTCC: Ceramic MEMS,” IMAPS Ceramics Advanced Technology Workshop, Denver, CO, March 26-27, 2001.
6 Zhong, J., Yi, M. and Bau, H. H., “A thermal cycler fabricated with Low-temperature Cofired Ceramic Tapes,” pp. 123–28 in IMECE 1999, MEMS 1999 Symposium Proceedings, MEMS, Vol 1 (Nashville, TN, Nov. 14-19, 1999).
7 Tayler, Barry E., Bidwell, Larry and Lawrence, Angela, “New Photoimageable LTCC Technology for Making a Wide Range of Ceramic Architectures and Circuits, HD International 2001 Conference, Apr 18, 2001, Santa Clara, CA.
8 Thimm, Alfred, Piwonski, Michael, Roosen, Andreas, and Ruska, Juergen. “Production a join between, e.g., a ceramic or powdered metal green product, German patent DE19725948, Issued December 24, 1998.
9 Barnwell, Peter, Reynolds, Quentin, Free, Charles, Tian, Zhengrong, “LTCC systems for Low GHz Frequencies – a Study of the Critical Properties for their Measurement Techniques,” IMAPS UK MicroTech 2001, 28-31 January 2001.
10 “Integration of a Receiver Front-End in Multilayer Ceramic Integrated Circuit (MCIC) Technology”, Estes, John, Kommrusch, Rich, and Huang, Rong Fong, 1997 Wireless Communications Conference Proceedings pg 165169
11 Mullis, K., “The Unusual Origin of the Polymerase Chain Reaction”, Scientific American, April (1990), p. 5665.
12 Kopp, M.U., Mello, A.J. de, Manz, A., “Chemical Amplification: Continuous-Flow PCR on a Chip”, Science 280, 1998, p. 10461048.
13 Sadler, D. J., Changrani, R. G., Chou, C., Zindel, D., Burdon, J. W., and Zenhausern, F., “Ceramic Magnetohydrodynamic (MHD) Pump”, Proc. Conf. on Microfluidics and BioMEMS, SPIE Vol. 4560, pp. 162170, San Francisco, CA, 2001.
14 Vojak, B.A., Park, S.-J., Wagner, C.J., Eden, J.G., Koripella, R., Burdon, J., Zenhausern, F. and Wilcox, D., Appl. Phys. Letters. 78, 1340 (2001)
15 Frame, J.W., John, P.C., DeTemple, T.A., and Eden, J.G., Appl.. Phys. Lett. 72, 2634 (1998)

Add Ceramic “MEMS” to the Pallet of MicroSystems Technologies

  • David L. Wilcox (a1), Jeremy W. Burdon (a1), Rajnish Changrani (a1), Chia-Fu Chou (a1), Steve Dai (a1), Ramesh Koripella (a1), Manny Oliver (a1), Daniel Sadler (a1), Paul von Allmen (a1) and Frederic Zenhausern (a1)...

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