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β-Acetoxyethyl Silsesquioxanes: Chloride-Free Precursors for SiO2 Films Via Staged Hydrolysis
Published online by Cambridge University Press: 10 February 2011
Abstract
Silsesquioxanes containing β-acetoxyethyl (BAE) groups are processible resins that can be employed as spin-on-glass precursors to dielectric silica films. Thermal treatment >250 °C results in extrusion of ethylene from the CH2CH2OCOCH3 moiety with formation of Si- OCOCH3 groups, which undergo facile hydrolysis to a silica network. A minor pathway involving extrusion of acetic acid leaves some silicon vinyl groups, leading to residual organic carbon in the material. However, addition of a fluoride ion catalyst greatly accelerates the major reaction, resulting in lower conversion temperatures (<200 °C), quantitative extrusion of ethylene, and essentially pure silica. Alternatively, BAESSQs can be processed photochemically (λ <200 nm) to cleanly yield silica at ambient temperature.
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- Copyright © Materials Research Society 2000
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