Skip to main content Accessibility help
×
Home

Accuracy and Reliability of Bulge Test Experiments

  • Martha K. Small (a1), Joost J. Vlassak (a1), Stephen F. Powell (a1), Brian J. Daniels (a1) and William D. Nix (a1)...

Abstract

In this paper we address possible causes for inconsistencies in bulge test results and describe methods by which the bulge test technique can be made to produce accurate and reliable results. Experiments have been conducted on a variety of materials: polyimide (PIQ13) and polycarbonate (Lexan), silver and silver-palladium multilayers, and silicon nitride. All the materials tested yield biaxial moduli that are in the range of expected values for the bulk material. In addition, the tests show that the technique can be used to differentiate between the elastic properties of materials throughout the range of elastic stiffnesses, with even crystallo-graphic texture having a notable impact on the measured modulus. These results will be presented along with the methods used for preparing bulge test samples.

Copyright

References

Hide All
1 Beams, J. W., Structure and Properties of Thin Films (John Wiley and Sons, New York, 1959) p. 183.
2 Small, M. K., Vlassak, J. and Nix, W. D., in Thin Films: Stresses and Mechanical Properties III, edited by Nix, W. D., Bravman, J. C., Arzt, E. and Freund, L. B. (Mat. Res. Soc. Symp. Proc. 239, Boston, MA, 1991) p. 257.
3 Small, M. K. and Nix, W. D., J. Mater. Res. 7 (6), 1553 (1992).
4 Lin, P. and Senturia, S., in Thin Films: Stresses and Mechanical Properties II, edited by Doerner, M. F., Oliver, W. C., Pharr, G. M. and Brotzen, F. R. (Mat. Res. Soc. Symp. Proc. 188, San Francisco, 1990) p. 41.
5 Vlassak, J. J. and Nix, W. D., J. Mater. Res. 7 (12), 3242 (1992).
6 Hitachi Chemical, product description.
7 Yang, W. M. C., Tsakalakos, T. and Hilliard, J. E., J. Appl. Phys. 48 (3), 876 (1977).
8 Henein, G. E. and Hilliard, J. E., J. Appl. Phys. 54 (2), 728 (1983).
9 Tsakalakos, T. and Hilliard, J. E., J. Appl. Phys. 54 (2), 734 (1983).
10 Davis, B. M., Li, D. X., Seidman, D. N., Ketterson, J. B., Bhadra, R. and Grimsditch, M., J. Mater. Res. 7 (6), 1356 (1992).
11 Baker, S. P., Small, M. K., Vlassak, J. J., Daniels, B. J. and Nix, W. D., in Mechanical Properties and Deformation Behavior of Materials Having Ultra-Fine Microstructures, (NATO Advanced Study Institute, Praia do Porto Novo, Portugal, 1992)
12 Small, M. K., Daniels, B. J., Clemens, B. M. and Nix, W. D., to be submitted to Journal of Materials Research ,
13 Allen, M. G., Mehregany, M., Howe, R. T. and Senturia, S. D., Appl. Phys. Lett. 51 (4), 241 (1987).
14 Maseeh, F. and Senturia, S. D., Polyimides: Materials, Chemistry and Characterization (Elsevier Science Publishers B. V., Amsterdam, 1989)
15 Mehregany, M., Allen, M. G. and Senturia, S. D., in IEEE Solid State Sensors Workshop, (IEEE Workshop, Hilton Head Island, SC, 1986)
16 Hall, C., Polymer Materials (John Wiley & Sons, New York, 1989) p. 58.

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed