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ZnO thin films applied as pH sensor in EGFET devices

Published online by Cambridge University Press:  23 July 2015

Jessica C. Fernandes  and
Marcelo Mulato
Jessica C. Fernandes
Affiliation:
Department of Physics, FFCLRP/University of São Paulo, Av. Bandeirantes, 3900 – Ribeirão Preto, São Paulo - Brazil
Marcelo Mulato
Affiliation:
Department of Physics, FFCLRP/University of São Paulo, Av. Bandeirantes, 3900 – Ribeirão Preto, São Paulo - Brazil
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Abstract

Zinc oxide thin films prepared by sol-gel and doped with different aluminum percentages were deposited by spray-pyrolysis deposition techniques on FTO and ITO substrates. The films were applied as the sensitive layer of pH-sensors EGFET devices. ZnO:Al films on FTO substrates shows a decrease in sensor quality with the dopant percentage increase. The opposite occurs when the substrate was ITO. The best quality film to be used as pH-sensor on FTO substrates was the ZnO:Al (3%) with 29 mV/pH sensitivity value and linear adjust of 0.99. For ITO substrates the best quality was achieved for ZnO:Al (10%), with sensitivity about 30 mV/pH and 0.99 linear adjust.

Keywords

pyrolysissensordopant
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1805: Symposium SS/TT – Fabrication and Properties of Oxide Thin Films, Nanostructures and Interfaces for Advanced Applications , 2015 , mrss15-2136685
Copyright
Copyright © Materials Research Society 2015 

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References

REFERENCES

Motto, P., Cauda, V., Stassi, S., Canavese, G., and Demarchi, D. in Functionalized single ZnO-metal junction as a pH sensor, (12th IEEE Sensors Conference, Baltimore, MD, USA, 2013)Google Scholar
Mishra, S. K., Rani, S., and Gupta, B. D., “Surface plasmon resonance based fiber optic hydrogen sulphide gas sensor utilizing nickel oxide doped ITO thin film,” Sensors Actuators B Chem., vol. 195, pp. 215–222, May 2014.CrossRefGoogle Scholar
Lee, C-T., Chiu, Y.S, Lou, L-R., Ho, S-C., and Chuang, C-T., “Integrated pH Sensors and Performance Improvement Mechanism of ZnO-Based Ion-Sensitive Field-Effect Transistors”, IEEE Sensors Journal, vol. 14, n. 2, pp. 490–496, Feb. 2014.CrossRefGoogle Scholar
Fernandes, J. C., Torres, K. A. F., Silva, G. O., Heimfarth, T., Carreño, M. N. P., Pereyra, I, and Mulato, M. in Biochemical sensors: Comparison of the performance of TiO2, SnO2:F and ITO used as the main sensing element, (226rd ECS Meeting, Toronto, ON, Canada, 2013).Google Scholar
Babu, B.J., et al. , “Structural Properties of Ultrasonically Sprayed Al-Doped ZnO (AZO) Thin Films: Effect of ZnO Buffer Layer on AZO”, J. of Elect. Mat., vol. 44, n. 2, pp. 699–705, 2015.CrossRefGoogle Scholar