Skip to main content Accessibility help
×
Home
Hostname: page-component-78dcdb465f-2ktwh Total loading time: 0.283 Render date: 2021-04-16T18:35:26.056Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }

X-Ray Measurements of Deformations in Films and Substrates in Heteroepitaxial SYSTEM GaAs/Ge

Published online by Cambridge University Press:  21 February 2011

N. Burle
Affiliation:
Lab. MATOP-CNRS, case 151, Fac. Sciences St-Jérúme, 13397 Marseille Cedex 20, France
B. Pichaud
Affiliation:
Lab. MATOP-CNRS, case 151, Fac. Sciences St-Jérúme, 13397 Marseille Cedex 20, France
O. Thomas
Affiliation:
Lab. MATOP-CNRS, case 151, Fac. Sciences St-Jérúme, 13397 Marseille Cedex 20, France
Get access

Abstract

X-Ray Transmission and Reflection Topography settings have been used to perform stress and strain measurements in the epitaxial system GaAs/Ge : radius of curvature of the whole sample is obtained from the Lang (transmission) set-up ; tetragonal distortion in the layer is deduced from the Berg-Barrett (reflection) setup. Comparison of these results and correlation with dislocations densities estimated from topographs enable the elastic state of the system to be known.

Type
Research Article
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below.

References

1. Matthews, J.W., Blakeslee, A.E. and Mader, S., Thin Sol. Films 33, 253 (1976)CrossRefGoogle Scholar
2. Burle, N., Pichaud, B., Guelton, N. and Saint-Jacques, R.G., (To be published in Thin Solid Films)Google Scholar
3. Lalande, G., Guelton, N., Cossement, D., Saint-Jacques, R.G. and Dodelet, J.P., Can. J. Phys. 72, 225 (1994)CrossRefGoogle Scholar
4. Cote, D., Dodelet, J.P., Lombos, B.A., and Dickson, J.I., J. Electrochem. Soc, 133, 1925 (1986)CrossRefGoogle Scholar
5. Stoney, G.G., Proc. Roy. Soc. (London) A82, 172 (1909).Google Scholar
6. Hoffman, R. W., in “Measurement Techniques for thin films”, Schwartz, B., Schwartz, N., eds., Electrochem. Soc. Inc. NY, p 312 (1967).Google Scholar
7. Schweitz, J.A., MRS Bulletin, 17, 7, 34 (1992)CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 6 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 16th April 2021. This data will be updated every 24 hours.

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

X-Ray Measurements of Deformations in Films and Substrates in Heteroepitaxial SYSTEM GaAs/Ge
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

X-Ray Measurements of Deformations in Films and Substrates in Heteroepitaxial SYSTEM GaAs/Ge
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

X-Ray Measurements of Deformations in Films and Substrates in Heteroepitaxial SYSTEM GaAs/Ge
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *