Skip to main content Accessibility help

We use cookies to distinguish you from other users and to provide you with a better experience on our websites. Close this message to accept cookies or find out how to manage your cookie settings.

Close cookie message
×
Home
  • Home
Hostname: page-component-77ffc5d9c7-95vkd Total loading time: 0.216 Render date: 2021-04-23T02:59:13.286Z Has data issue: true Feature Flags: { "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true, "metricsAbstractViews": false, "figures": false, "newCiteModal": false, "newCitedByModal": true }
EnglishFrançais
MRS Online Proceedings Library (OPL) MRS Online Proceedings Library (OPL)

Article contents

Tribological Propertees of Carbon thin Films Prepared by Plasma-Free Sputtering Method

Published online by Cambridge University Press:  22 February 2011

T. Hirata  and
M. Naoe
T. Hirata
Affiliation:
Dept. of Physical Electronics, Tokyo Institute of Technology, 2–12–1, O-okayama, Meguro-ku, Tokyo 152, Japan
M. Naoe
Affiliation:
Dept. of Physical Electronics, Tokyo Institute of Technology, 2–12–1, O-okayama, Meguro-ku, Tokyo 152, Japan
Get access

Abstract

Amorphous “Diamond-like” carbon films were deposited on plasma-free substrates at low temperature by the Facing Targets Sputtering (FTS) method. Tribological characteristics determined by tap, scratch and slide tests were much better than those for amorphous carbon films deposited by the conventional Magnetron Sputtering (MS) method. Consequently, these films deposited by the FTS method were surely useful for protective layers in rigid magnetic disk.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 239: Symposium D – Thin Films: Stresses and Mechanical Properties III , 1991 , 635
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below.
If you should have access and can't see this content please contact technical support.

References

1. Weissmantel, C. et al., Thin Solid Films, 96, 31(1982).CrossRefGoogle Scholar
2. Weissmantel, C. et al., Thin Solid Films, 100, 383(1983).CrossRefGoogle Scholar
3. Enke, K., Thin Solid Films, 80, 277(1981).CrossRefGoogle Scholar
4. Holland, L. and Ojha, S.M., Thin Solid Films, 58, 107(1979).CrossRefGoogle Scholar
5. Zelez, Joseph, RCA Rev., 43, 665(1982); J. Vac. Sci. Tecnol. A1, 305(1983).Google Scholar
6. Bubenzer, A. et al., J. AppL Phys., 54, 4590(1983).CrossRefGoogle Scholar
7. Dischler, B. et al., AppL Phys. Lett., 42, 636(1983); Solid State Commun., 48, 105(1983).CrossRefGoogle Scholar
8. Ojha, S.M. and Holland, L., Thin Solid Films, 40, L31(1977).CrossRefGoogle Scholar
9. Banks, B.A. and Rutledge, S.K., J. Vac. Sci. Technol, 21, 807(1982).CrossRefGoogle Scholar
10. Maoe, M., Yamanaka, S. and Hoshi, Y., IEEE Trans. Mag., MAG–16 646(1980).Google Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 4 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 23rd April 2021. This data will be updated every 24 hours.

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

Tribological Propertees of Carbon thin Films Prepared by Plasma-Free Sputtering Method
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

Tribological Propertees of Carbon thin Films Prepared by Plasma-Free Sputtering Method
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

Tribological Propertees of Carbon thin Films Prepared by Plasma-Free Sputtering Method
Available formats
×
×

Reply to: Submit a response

Your details

Conflicting interests

Do you have any conflicting interests? *