No CrossRef data available.
Article contents
Thin Film Reactions on Alloy Semiconductor Substrates
Published online by Cambridge University Press: 25 February 2011
Abstract
The interactions between Pt thin films and In53Ga47As have been studied. An important result is that the reaction kinetics deviate from those of other metal/compound semiconductor reactions. The kinetics can be divided into two stages, where the reaction slows by a factor of 5 after ~60 minutes of annealing at 400°C. In addition, Auger depth-profiling indicates that an In-rich layer develops at the reacted layer/substrate interface.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1991