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MRS Online Proceedings Library (OPL) MRS Online Proceedings Library (OPL)

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Synthesis of Carbon, Silicon, and Boron-nitride Nanostructures via Microwave Plasma Enhanced Chemical Vapor Deposition

Published online by Cambridge University Press:  15 March 2011

Hongtao Cui ,
Wei Liu  and
Brian R. Stoner
Hongtao Cui
Affiliation:
Department of Physics and Astronomy, UNC-CH, Chapel Hill, NC
Wei Liu
Affiliation:
Department of Materials Science and Engineering, NCSU, Raleigh, NC
Brian R. Stoner
Affiliation:
Department of Physics and Astronomy, UNC-CH, Chapel Hill, NC stoner@physics.unc.edu
Corresponding
E-mail address:
stoner@physics.unc.edu
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Abstract

Carbon, silicon nitride and boron nitride nanostructures were synthesized using microwave plasma enhanced chemical vapor deposition. Both scanning and transmission electron microscopies and x-ray diffraction were used to observe the morphology and structures while energy dispersive x-ray was used to determine the composition of the nanostructured materials. Bamboo-like multiwalled carbon nanotube structures were observed while silicon nitride showed novel needle-like solid structures. All materials were deposited using a thin film iron catalyst seeded on either silicon with reactive plasma gases containing either a mixture of methane and ammonia or ammonia. A general discussion of the nucleation and growth mechanisms for the various materials will also be included.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 633: Symposium A – Nanotubes and Related Materials , 2000 , A13.42
Copyright
Copyright © Materials Research Society 2001

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References

1 Saito, Y., Uemura, S., and Hamaguchi, K., Japanese Journal of Applied Physics Part 2-Letters 37, L346–L348 (1998).CrossRefGoogle Scholar
2 Tans, S. J., Verschueren, A. R. M., and Dekker, C., Nature 393, 49–52 (1998).CrossRefGoogle Scholar
3 Hafner, J. H., Cheung, C. L., and Lieber, C. M., Nature 398, 761–762 (1999).CrossRefGoogle Scholar
4 Chung, S. W., Yu, J. Y., and Heath, J. R., Applied Physics Letters 76, 2068–2070 (2000).CrossRefGoogle Scholar
5 Iijima, S., Nature 354, 56–58 (1991).CrossRefGoogle Scholar
6 Morales, A. M. and Lieber, C. M., Science 279, 208–211 (1998).CrossRefGoogle Scholar
7 Stoner, B. R., Ma, G. H. M., Wolter, S. D., and Glass, J. T., Physical Review B-Condensed Matter 45, 11067–11084 (1992).CrossRefGoogle Scholar
8 Cui, H., Zhou, O., and Stoner, B. R., Journal of Applied Physics 88, 6072–6074 (2000).CrossRefGoogle Scholar
9 Wagner, R. S. and Ellis, W. C., Applied Physics Letters 4, 89–90 (1964).CrossRefGoogle Scholar

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Synthesis of Carbon, Silicon, and Boron-nitride Nanostructures via Microwave Plasma Enhanced Chemical Vapor Deposition
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