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MRS Online Proceedings Library (OPL) MRS Online Proceedings Library (OPL)

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Synthesis and electrical characterization of ZnO and TiO2 thin films and their use as sensitive layer of pH field effect transistor sensors

Published online by Cambridge University Press:  22 August 2014

Jessica C. Fernandes  and
Marcelo Mulato
Jessica C. Fernandes
Affiliation:
Department of Physics, FFCLRP/University of São Paulo, Av. Bandeirantes, 3900 – Ribeirão Preto/São Paulo – Brazil
Marcelo Mulato
Affiliation:
Department of Physics, FFCLRP/University of São Paulo, Av. Bandeirantes, 3900 – Ribeirão Preto/São Paulo – Brazil
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Abstract

Oxide thin films of zinc and titanium materials were deposited by different deposition techniques, to be applied as sensitive layers of pH sensor – EGFET device. The deposition techniques tested were dip-coat, spin-coat, electrodeposition and spray-pyrolysis. The routine and the parameters of each technique were changed aiming optimized the procedures. The pHs buffer solutions tested ranged from 2 to 12. ZnO thin film shows sensitivity about 23 mV/pH, while TiO2 thin films shows only 13.8 mV/pH. The final purpose of this study is to optimize the parameters for each deposition technique for both oxide materials.

Keywords

coating electrical properties sensor
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1675: Symposium K/RR – Synthesis, Characterization and Applications of Functional Materials— Thin Films and Nanostructures , 2014 , pp. 53 - 58
Copyright
Copyright © Materials Research Society 2014 

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