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Specular and Off-Specular X-Ray Scattering as Quantitative Structural Probes of Multilayers. Application to MN/IR(111) Superlattices

Published online by Cambridge University Press:  15 February 2011

H.M. Fischer
Affiliation:
Lab. Phys. Sol., Univ. Nancy I, B.P. 239, 54506 Vandoeuvre-lès-Nancy Cedex, France
H.E. Fischer
Affiliation:
LURE (CNRS/CEA/MESR), Bât. 209d, Univ. Paris.Sud, 91405 Orsay Cedex, France
M. Bessiere
Affiliation:
LURE (CNRS/CEA/MESR), Bât. 209d, Univ. Paris.Sud, 91405 Orsay Cedex, France
J.-F. Bobo
Affiliation:
Lab. Phys. Sol., Univ. Nancy I, B.P. 239, 54506 Vandoeuvre-lès-Nancy Cedex, France
O. Lenoble
Affiliation:
Lab. Phys. Sol., Univ. Nancy I, B.P. 239, 54506 Vandoeuvre-lès-Nancy Cedex, France
S. Andrieu
Affiliation:
Lab. Phys. Sol., Univ. Nancy I, B.P. 239, 54506 Vandoeuvre-lès-Nancy Cedex, France
M. Piecuch
Affiliation:
Lab. Phys. Sol., Univ. Nancy I, B.P. 239, 54506 Vandoeuvre-lès-Nancy Cedex, France
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Abstract

Diffuse scattering of X rays is a particularly useful tool for studying interface and surface defects in single layer films. We have extended this technique to the study of multilayers. The samples are Mn/Ir(111) superlattices where Mn is pseudomorphic to Ir. We have studied three typical samples prepared at different substrate temperatures. Using theoretical analyses and simulations of both specular and off-specular X-ray scattering data at small angles as well as large angles, we show that large length-scale interfacial roughness is mainly due to the formation of terraces during growth at low deposition temperature, whereas small length-scale interfacial roughness occurs preferably at high deposition temperature and is mainly due to an atomic interdiffusion (i.e. the formation of an interface alloy) which manages to maintain a high degree of crystallographic order.

Type
Research Article
Copyright
Copyright © Materials Research Society 1995

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References

[1] Vidal, B. and Vincent, P., Appl. Opt. 23 (1988) 2297.Google Scholar
[2] Daillant, J. and Bélorgey, O., J. Chem. Phys. 97 (1994) 10668.Google Scholar
[3] Sinha, S.K., Sirota, E.B., Garoff, S. and Stanley, H.B., Phys. Rev. B 38 (1988) 2297.CrossRefGoogle Scholar
[4] Sinha, S.K., J. Phys. III France 4 (1994) 1543.CrossRefGoogle Scholar
[5] Fischer, H.E., Fischer, H.M., Durand, O., Pelligrino, O., Piecuch, M., Lefebvre, S., Bessière, M., to be published in Nuclear Instruments and Methods B.Google Scholar

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Specular and Off-Specular X-Ray Scattering as Quantitative Structural Probes of Multilayers. Application to MN/IR(111) Superlattices
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Specular and Off-Specular X-Ray Scattering as Quantitative Structural Probes of Multilayers. Application to MN/IR(111) Superlattices
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