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MRS Online Proceedings Library (OPL) MRS Online Proceedings Library (OPL)

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Self-catalyzed InP Nanowires on Patterned Si Substrates

Published online by Cambridge University Press:  18 May 2015

Kenichi Kawaguchi ,
Hisao Sudo ,
Manabu Matsuda ,
Kazuya Takemoto ,
Tsuyoshi Yamamoto  and
Yasuhiko Arakawa
Kenichi Kawaguchi
Affiliation:
NanoQuine, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan.
Hisao Sudo
Affiliation:
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 243-0197, Japan.
Manabu Matsuda
Affiliation:
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 243-0197, Japan.
Kazuya Takemoto
Affiliation:
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 243-0197, Japan.
Tsuyoshi Yamamoto
Affiliation:
Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi, 243-0197, Japan.
Yasuhiko Arakawa
Affiliation:
NanoQuine, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan. IIS, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan.
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Abstract

Self-catalyzed growth of position-defined InP nanowires (NWs) was investigated on SiO2-mask-pattered Si substrates using metalorganic vapor-phase epitaxy. Using low growth temperatures and high group-III flow rates, pyramidal InP NWs were formed vertically on the mask openings. The diameter and tapering of the InP NWs were successfully controlled by the introduction of HCl and H2S gases during the NW growth. In addition, crystal growth of radial InP/InAsP/InP quantum wells on the sidewall of the InP NWs was performed on Si substrates.

Keywords

nanostructure semiconducting metalorganic deposition
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1751: Symposium LL – Semiconductor Nanowires—Growth, Physics, Devices and Applications , 2015 , mrsf14-1751-ll06-03
Copyright
Copyright © Materials Research Society 2015 

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References

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