Skip to main content Accessibility help
×
Home

RF Aerosol Mist Plasma Deposition of Oxide Films

Published online by Cambridge University Press:  21 February 2011

J. A. A. Williams
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
C. Q. Shen
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
K. D. Vuong
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
E. Tenpas
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
R. A. Condrate
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
D. H. Lee
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
H. Wang
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
J. Fagan
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
X. W. Wang
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
J. Stuckey
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
M. DeMarco
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
W. Yu
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
A. Petrou
Affiliation:
Alfred University, Alfred, New York 14802, Buffalo State College, Buffalo, New York 14222, SUNY Buffalo New York 14260
Get access

Abstract

We report new results on nano-scaled oxide films deposited by an RF aerosol mist plasma technique: including indium tin oxide transparent conductive films; yttria stabilized zirconia, nickel iron oxide/YSZ cermet, and lanthanum strontium manganite for fuel cell applications; Bi2Sr2Ca2Cu3Ox superconductor films; gadolinium iron oxide for magnetic heat pumps; silicon oxide for protective coatings, etc. Since this deposition process occurs in an atmospheric environment, it has potential for large scale production. The maximum deposition rate is approximately 1 micrometer per minute per centimeter squared. Substrate temperatures were between 300°C and 900°C. Crystal sizes are analyzed by XRD (Shadow Programs). Some films were also characterized by resistance, optical(IR-UV-Vis transmission/reflection and FTIR) and Mössbauer measurements. Film morphology was found to be strongly dependent on deposition parameters. Controlling the deposition rate by altering solution concentration and mist feed rates, as well as altering plasma torch settings and substrate temperature allowed the formation of different film morphologies. Film density, thickness, and crystallite size could be controlled to obtain films of differing characteristics. This is advantageous to fuel cell depositions where a dense electrolyte as well as porous electrodes (anode and cathode) are required.

Type
Research Article
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below.

References

1. Pulker, H. K., Coatings on Glass, (FJsevier Science Publishing, NY, 1984) p391.Google Scholar
2. Chen, Z., Yang, K. and Wang, J., Thin Solid Films, 162 305313 (1988)CrossRefGoogle Scholar
3. Ganluli, B., in Reviews of Solid State Science, Vol. 3 (World Scientific Publishing, New York, 1989) p579Google Scholar
4. Okada, T., Hamatani, H. and Yoshida, T., J. Am. Ceram. Soc. 72[11] 211–16 (1989)Google Scholar
5. Howard, S. A., SHADOW: A system for X-Ray Powder Diffraction Pattern Analysis; Annotated Program Listings and Tutorial, (University of Missouri-Rolla, 1990).Google Scholar
6. Siegel, R. W., in Mechanical Properties and Deformation Behavior of Materials Having Ultra-Fine Microstructures, edited by Nasiasl, M. et al., (1993) p509 CrossRefGoogle Scholar
7. Orliukas, A., Sasaki, K., Bohac, P. and Gauckler, L.J., in International Symposium on Solid Oxide Fuel Cells (2nd: 1991: Athens. Greece), edited by Grosz, F. (Commission of the European Communities 1991) pp. 377385.Google Scholar
8. Kaur, I. and Gust, W., Fundamentals of Grain and Interphase Boundary Diffusion, 2nd ed. (Ziegler Press, Stuttgart, (1989) pp. 2751.Google Scholar
9. Smay, G. L., J. Non-cryst. Solid, 38&39 359364 (1980)CrossRefGoogle Scholar

Full text views

Full text views reflects PDF downloads, PDFs sent to Google Drive, Dropbox and Kindle and HTML full text views.

Total number of HTML views: 0
Total number of PDF views: 7 *
View data table for this chart

* Views captured on Cambridge Core between September 2016 - 16th January 2021. This data will be updated every 24 hours.

Hostname: page-component-77fc7d77f9-qzt2x Total loading time: 0.255 Render date: 2021-01-16T22:31:38.298Z Query parameters: { "hasAccess": "0", "openAccess": "0", "isLogged": "0", "lang": "en" } Feature Flags last update: Sat Jan 16 2021 21:53:44 GMT+0000 (Coordinated Universal Time) Feature Flags: { "metrics": true, "metricsAbstractViews": false, "peerReview": true, "crossMark": true, "comments": true, "relatedCommentaries": true, "subject": true, "clr": true, "languageSwitch": true, "figures": false, "newCiteModal": false, "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true }

Send article to Kindle

To send this article to your Kindle, first ensure no-reply@cambridge.org is added to your Approved Personal Document E-mail List under your Personal Document Settings on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part of your Kindle email address below. Find out more about sending to your Kindle. Find out more about sending to your Kindle.

Note you can select to send to either the @free.kindle.com or @kindle.com variations. ‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi. ‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.

Find out more about the Kindle Personal Document Service.

RF Aerosol Mist Plasma Deposition of Oxide Films
Available formats
×

Send article to Dropbox

To send this article to your Dropbox account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Dropbox.

RF Aerosol Mist Plasma Deposition of Oxide Films
Available formats
×

Send article to Google Drive

To send this article to your Google Drive account, please select one or more formats and confirm that you agree to abide by our usage policies. If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your <service> account. Find out more about sending content to Google Drive.

RF Aerosol Mist Plasma Deposition of Oxide Films
Available formats
×
×

Reply to: Submit a response


Your details


Conflicting interests

Do you have any conflicting interests? *