Hostname: page-component-848d4c4894-pftt2 Total loading time: 0 Render date: 2024-05-24T18:00:32.105Z Has data issue: false hasContentIssue false

Residual Ion Implantation Damage at Source/Drain Junctions of Excimer Laser Annealed Polycrystalline Silicon Thin Film Transistor

Published online by Cambridge University Press:  01 February 2011

Kee-Chan Park
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, KOREA.
Jae-Shin Kim
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, KOREA.
Woo-Jin Nam
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, KOREA.
Min-Koo Han
Affiliation:
School of Electrical Engineering, Seoul National University, Seoul, 151-742, KOREA.
Get access

Abstract

Residual ion implantation damage at source/drain junctions of excimer laser annealed polycrystalline silicon (poly-Si) thin film transistor (TFT) was investigated by high-resolution transmission electron microscopy (HR-TEM). Cross-sectional TEM observation showed that XeCl excimer laser (λ=308 nm) energy decreased considerably at the source/drain junctions of top-gated poly-Si TFT due to laser beam diffraction at the gate electrode edges and that the silicon layer amorphized by ion implantation, was not completely annealed at the juncions. The HR-TEM observation showed severe lattice disorder at the junctions of poly-Si TFT.

Type
Research Article
Copyright
Copyright © Materials Research Society 2002

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Mimura, A., Ohwada, J.I., Hosokawa, Y., Suzuki, T. Kawakami, H. and Miyata, K., IEEE Trans. Elec. Dev. 35, 418 (1988).Google Scholar
2. Lee, J.Y., Han, C.H. and Kim, C.K., IEEE Electron Device Lett. 15, 301 (1994).Google Scholar
3. Rohlfing, F.W., Ayres, J.R., Brotherton, S.D., Fisher, C.A., McCulloch, D.J., International Display Research Conference, 119122 (2000).Google Scholar
4. Moller, K.D., OPTICS, (University Science Books, Mill Valley, CA, 1988) p. 172.Google Scholar