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MRS Online Proceedings Library (OPL) MRS Online Proceedings Library (OPL)

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Production of Microstructures by Laser Pyrolysis

Published online by Cambridge University Press:  15 February 2011

Dieter Bä;uerle
Dieter Bä;uerle
Affiliation:
Angewandte Physik, University of Linz, 4040 Linz, Austria
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Abstract

Laser pyrolysis at short wavelengths is a powerful tool for micron-sized one-step local deposition of insulating, semiconducting and metallic materials from the gas phase. Various structures, e.g. stripes on different substrates, and rods of various lengths and diameters, have been produced. The morphology of the deposited material, the deposition rate, and the dimensions (typically 1-300 μm) of the structures were investigated quantitatively as functions of laser irradiance local temperature, laser focus diameter, scanning velocity, and gas pressure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 17: Symposium I – Laser Diagnostics and Photochemical Processing for Semiconductor Devices , 1982 , 19
Copyright
Copyright © Materials Research Society 1983

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References

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