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A photothermal method of simultaneous determination of ultra-shallow junction depth and abruptness

Published online by Cambridge University Press:  17 March 2011

Alex Salnick ,
Lena Nicolaides ,
Jon Opsal ,
Amitabh Jain ,
Duncan Rogers  and
Lance Robertson
Alex Salnick
Affiliation:
Therma-Wave, Inc., 1250 Reliance Way, Fremont, CA 94539
Lena Nicolaides
Affiliation:
Therma-Wave, Inc., 1250 Reliance Way, Fremont, CA 94539
Jon Opsal
Affiliation:
Therma-Wave, Inc., 1250 Reliance Way, Fremont, CA 94539
Amitabh Jain
Affiliation:
Texas Instruments, Inc., 125100 TI Boulevard, Dallas, Texas 75243
Duncan Rogers
Affiliation:
Texas Instruments, Inc., 125100 TI Boulevard, Dallas, Texas 75243
Lance Robertson
Affiliation:
Texas Instruments, Inc., 125100 TI Boulevard, Dallas, Texas 75243
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Abstract

Thermal wave (TW) studies of ultra-shallow junctions (USJ) formed by ion implantation into a semiconductor wafer followed by rapid thermal annealing (RTP) are described. It is shown that using the TW technique allows for a simultaneous determination of the most important USJ parameters – depth and profile abruptness. Experimental results for junction depth and abruptness obtained on a set of B+-implanted, RTP-annealed USJ samples show better than 0.99 correlations to the corresponding secondary ion mass spectroscopy (SIMS) data.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 810: Symposium C – Silicon Front-End Junction Formation-Physics and Technology , 2004 , C11.7
Copyright
Copyright © Materials Research Society 2004

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References

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Hostname: page-component-77fc7d77f9-xbf5p Total loading time: 0.262 Render date: 2021-01-16T03:11:47.548Z Query parameters: { "hasAccess": "0", "openAccess": "0", "isLogged": "0", "lang": "en" } Feature Flags last update: Sat Jan 16 2021 02:51:02 GMT+0000 (Coordinated Universal Time) Feature Flags: { "metrics": true, "metricsAbstractViews": false, "peerReview": true, "crossMark": true, "comments": true, "relatedCommentaries": true, "subject": true, "clr": true, "languageSwitch": true, "figures": false, "newCiteModal": false, "shouldUseShareProductTool": true, "shouldUseHypothesis": true, "isUnsiloEnabled": true }

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