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Novel Method to Synthesize Ceria Coated Silica particles

Published online by Cambridge University Press:  31 January 2011

Myoung-hwan Oh ,
Jae Seok Lee ,
Sushant Gupta ,
Tae Kon Kim ,
Aniroddh Kaanna  and
Rajiv K Singh
Myoung-hwan Oh
Affiliation:
mhplusmy@ufl.edu, University of Florida, 100 Rhines Hall, P.O. Box 116400, Gainesville, Florida, 32611, United States
Jae Seok Lee
Affiliation:
jaeseok@ufl.edu, University of Florida, Gainesville, United States
Sushant Gupta
Affiliation:
sushant3@ufl.edu, University of Florida, Gainesville, United States
Tae Kon Kim
Affiliation:
kimtg76@ufl.edu, United States
Aniroddh Kaanna
Affiliation:
aniruddh@ufl.edu, University of Florida, Gainesville, United States
Rajiv K Singh
Affiliation:
rsing@mse.ufl.edu, United States
Corresponding
E-mail address:
mhplusmy@ufl.edu
jaeseok@ufl.edu
sushant3@ufl.edu
kimtg76@ufl.edu
aniruddh@ufl.edu
rsing@mse.ufl.edu
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Abstract

Monodispersed ceria coated silica particles were prepared by a new type of ceria precursor. The ceria precursor was synthesized by alkoxide method, which employs ethanol as solvent. The synthesized particles were characterized with scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). It was found that well-crystalline ceria coatings were deposited on the surface of the silica particles without post-heat treatment. In addition, the coated particles prepared by a new precursor were uniformly dispersed without the formation of hard aggregate as compared to those obtained by conventional method.

Keywords

Ce coating powder
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1157: Symposium E – Science and Technology of Chemical Mechanical Planarization (CMP) , 2009 , 1157-E08-07
Copyright
Copyright © Materials Research Society 2009

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References

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