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A Novel Method to Determine The Mechanical Properties of Ultra-Thin Films.

Published online by Cambridge University Press:  10 February 2011

C. C. White  and
W. L. Wu
C. C. White
Affiliation:
National Institute of Standards and Technology, Polymers Division, Gaithersburg, MD 20899
W. L. Wu
Affiliation:
National Institute of Standards and Technology, Polymers Division, Gaithersburg, MD 20899
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Abstract

Recent experimental results based on x-ray reflectivity[1, 2], and ellipsometry[3] have demonstrated that physical properties of polymer films thinner than one micron may deviate significantly from bulk values[4]. The mechanical properties of the ultra-thin films (sub-micron) are experimentally difficult to determine with precision. The quartz crystal microbalance is an established technique for measuring properties of polymer thin films of a few microns thick. [5–7] Recently this quartz crystal microbalance technique has been modified for measuring the mechanical properties of sub-micron polymer films with high precision. The details and preliminary results from this recently modified quartz crystal microbalance technique will be presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 511: Symposium E – Low Dielectric Constant Materials IV , 1998 , 177
Copyright
Copyright © Materials Research Society 1998

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